Important Notice
- Cautions and Request on Handling of Parts Deposited with Thin Metal Films in Thin Film Deposition Systems(PDF:108KB)
- [Revice]Notice of Periodic Inspection of Electrical Parts(PDF:275KB)
- Pay attention to Aging of electric units(PDF:708KB)
- Inspection and Replacement Notice of Timing Belt for 300 Series Sputtering System(PDF:814KB)