Important Notice

Important Notice

  • Cautions and Request on Handling of Parts Deposited with Thin Metal Films in Thin Film Deposition Systems(PDF:108KB)
  • [Revice]Notice of Periodic Inspection of Electrical Parts(PDF:275KB)
  • Pay attention to Aging of electric units(PDF:708KB)
  • Inspection and Replacement Notice of Timing Belt for 300 Series Sputtering System(PDF:814KB)
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