Quadrupole Mass Spectrometers

Quadrupole Mass Spectrometer(transducer type)
M-070QA-TDF, M-101QA-TDF, M-101/201QA-TDM

M-101QA-TDF and M-101/201QA-TDM are highly sensitive and functional quadrupole mass spectrometers with low gas emission that are exclusively designed to be controlled from a PC.

M-070QA-TDF is a low cost version that is suitable for residual gas monitoring of various vacuum equipment.

Quadrupole Mass Spectrometer(transducer type) M-070QA-TDF, M-101QA-TDF, M-101/201QA-TDM CE_marking RoHS

Features

  1. High-sensitivity
      Uses secondary-emission electron multiplier tube for detector (M-101/201QA-TDM)
  2. Low gas emission analyzer tube
      Uses low gas emission ion source
      Provides degassing function (*1)
  3. Excellent basic performance - Supporting advanced analysis -
      Enables detailed setting of ionization voltage and emission current (*1)
      Wide dynamic range

*1: Excluding M-070QA-TDF.

Applications

Residual gas monitors, vacuum monitor for accelerators, inorganic gas analysis, thermal desorption gas analysis.

Specifications

Model Standard model High-sensitivity model
M-070QA-TDF M-101QA-TDF M-101QA-TDM M-201QA-TDM
Basic
performance
Measurement
weight
range
1 to 70amu 1 to 100amu 1 to 100amu 1 to 200amu
Resolution M/ΔM≧2M
Sensitivity
(N2)
FC 1.5×10-6A/Pa or greater 7.0×10-6A/Pa or greater - -
SEM - 2.5A/Pa or greater 1.8A/Pa or greater
Minimum detected
partial pressure
6.7×10-9Pa or less 5.0×10-10Pa or less 1.0×10-12Pa or less 1.0×10-12Pa or less
Operating pressure 1.3×10-2Pa or less
Dynamic range 6 digits 7 digits
Specifications Detector FC
EM -
Ion source Cage type Cage type (Option: box type*1)
Filament Yttria coated iridium×2 Yttria coated iridium×2
Option: Tungsten*1
Baking temperature 250℃(Analyzer tube only)
Degas function - Electron bombardment
Connection flange φ70ICF
Rated input voltage 100V to 240VAC
Maximum power
consumption
60W 90W
Weight Analyzer
tube
1.5kg 1.4kg 1.6kg
Controller 2.1kg 2.2kg
Communication interface RS-232C/485
Standard software QUADVISION
Conformity CE marking, RoHS

*1. Please contact us for specifications of options.

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