Compact Gas Analysis System D Series

Compact Gas Analysis System D Series
M-101/201/400GA-D Series

The M-101/201/401GA-DD Series products are the result of quadrupole mass spectrometer technology application. They are gas analysis systems most suitable for various gas analysis and in R&D fields.

The quadrupole mass spectrometer analyzer can be optionally combined with the TMP pumping system to enable flexible configuration according to your application.

Compact Gas Analysis System D Series M-101/201/400GA-D Series


  1. Customizable system
    -Capable of system setup combining quadrupole mass spectrometer, gas feed through system and other options according to application
    -Analyzer is selectable from M-101QA-TDF, M-101/201QA-TDM, and M-401QA-M(high sensitivity/high speed)/
  2. Space saving compact design
    -Compact structure with quadrupole mass spectrometer and TMP pumping system mounted on a small rack
  3. Simple operation
    -PC controlled simple measurement operations


  • Vacuum equipment residual gas analysis
  • Thermobalance emission gas analysis
  • Thermal desorption gas analysis
  • Furnace gas analysis
  • Sealed gas analysis


  M-101GA-DF M-101GA-DM M-201GA-DM M-401GA-DM
Analyzer M-101QA-TDF M-101QA-TDM M-201QA-TDM M-401QA-M
Measured mass 1 to 100 m/z 1 to 200 m/z 1 to 410 m/z
Sensitivity 100ppm 10ppm 10ppm 10ppm
Ultimate pressure 5×10-6Pa or less
Inducible gas
Sample gas
VLV <Atmospheric pressure
Capillary tube Atmospheric pressure or less
SS-1M <3Pa
Multi-ion detection mode, Partial pressure measurement mode, Mass peak mode, Leak test mode
Inquire for details
Utility Power
AC100V 2.0kVA
N2gas 0.5MPa (Supply when N2 purge is necessary.)
Connection flange φ70ICF φ1141CF