Ion Pump/Noble Pump

Ion Pump/Noble Pump

Ion pump/noble pump is an ultra-high vacuum pump which utilizes the gas adsorption properties of the cathode material sputtered by cold cathode discharge within a magnetic field and the continuous formation of active getter film by sputtering cathode material (Ti) during collision with the cathode.

Ion Pump/Noble Pump

Features

  1. Fully oil free
    Clean vacuum can be obtained without contaminating the system because no organic materials such as oil is used.
  2. Ultra-high vacuum, extreme high vacuum
    Ion pump/noble pump is best suited for creating extreme high vacuum in the range from 10-1Pa to 10-9Pa.
  3. Unattended operation
    Only electrical power is required making it convenient for night time unattended or remote operation.
  4. Inert gas pumping (noble pump)
    Improved inert gas pumping speed compared to diode ion pump. (Approximately 21% of air with argon)

Applications

  • Fully oil free ultra-high vacuum and extreme vacuum pumping systems
  • Electron microscopes, surface analyzers
  • Particle accelerators, nuclear fusion experimental devices, space environmental testing equipment
  • Vacuum retention pump for electron tubes, etc.

Specifications

20L/s Ion Pump, Noble Pump

Pump Name 20L/s Ion Pump 20L/s Nobel Pump
Type 912-7125 912-7120
Pumping speed (N2 gas) 20L/s
Operating range(Note 1) 10-1 to 10-9Pa 1 to 10-9Pa
Ready to start
pressure(Note 1)
1.3 Pa or less 6.7 Pa or less
Capacity 1.4L
Maximum heating
temperature
250℃
Inlet φ70ICF
Current input terminal Non-replaceable
Element (replaceable) Non-replaceable
Magnet 912-7121(×1) included
Weight 10.5kg
20L/s Ion Pump/Noble Pump

30L/s Ion Pump, Noble Pump

Pump Name 30L/s Ion Pump 20L/s Nobel Pump
Type 912-7135 912-7130
Pumping speed (N2 gas) 30L/s
Operating range(Note 1) 10-1 to 10-9Pa 1 to 10-9Pa
Ready to start
pressure(Note 1)
1.3 Pa or less 6.7 Pa or less
Capacity 2.2L
Maximum heating
temperature
250℃
Inlet φ114ICF
Current input terminal 954-7281
Element (replaceable) Non-replaceable
Magnet 912-7121 (×1) included
Weight 12.5kg
30L/s Ion Pump/Noble Pump

60L/s Ion Pump, Noble Pump

Pump Name 60L/s Ion Pump 60L/s Nobel Pump
Type 912-7165 912-7160
Pumping speed (N2 gas) 60L/s
Operating range(Note 1) 10-1 to 10-9Pa 1 to 10-9Pa
Ready to start
pressure(Note 1)
1.3 Pa or less 6.7 Pa or less
Capacity 6.2L
Maximum heating
temperature
250℃
Inlet φ152ICF
Current input terminal 954-7281
Element (replaceable) 915-7027 (1set) 915-9527 (1set)
Magnet 912-7121 (×2) included
Weight 25.6kg
60L/s Ion Pump/Noble Pump

110L/s Noble Pump, 140L/s Ion Pump

Pump Name 110L/s Nobel Pump 140L/s Ion Pump
Type 912-7020 912-7010
Pumping speed (N2 gas) 110L/s 140L/s
Operating range(Note 1) 1 to 10-9Pa 10-1 to 10-9Pa
Ready to start
pressure(Note 1)
6.7 Pa or less 1.3 Pa or less
Capacity 18L
Maximum heating
temperature
250℃
Inlet φ203ICF
Current input terminal 954-7281
Element (replaceable) 915-9520 (×1) 915-9510 (×1)
Magnet 912-7001 (×1) included
Weight 48kg
110L/s Noble Pump , 140L/s Ion Pump

220L/s Noble Pump

Pump Name 220L/s Noble Pump
Type 912-7040 912-7041
Pumping speed (N2 gas) 220L/s
Operating range(Note 1) 5×10-1 to 10-9Pa
Ready to start
pressure(Note 1)
3.4 Pa or less
Capacity 26L 28L
Maximum heating
temperature
250℃
Inlet φ203ICF
Current input terminal 954-7281
Element (replaceable) 915-9510 (x2)
Magnet 912-7002 (×1) included 912-7001 (×2) included
Weight 85kg 90kg
220L/s Noble Pump

270L/s Ion Pump

Pump Name 270L/s Ion Pump
Type 912-7030 912-7031
Pumping speed (N2 gas) 270L/s
Operating range(Note 1) 5×10-2 to 10-9Pa
Ready to start
pressure(Note 1)
6.5×10-1Pa or less
Capacity 26L 28L
Maximum heating
temperature
250℃
Inlet φ203ICF
Current input terminal 954-7281
Element (replaceable) 915-9510 (x2)
Magnet 912-7002 (×1) included 912-7001 (×2) included
Weight 85kg 90kg
270L/s Ion Pump

400L/s Noble Pump, 500L/s Ion Pump

Pump Name 400L/s Nobel Pump 500L/s Ion Pump
Type 912-7060 912-7050
Pumping speed (N2 gas) 400L/s 500L/s
Operating range(Note 1) 1 to 10-9Pa 10-1 to 10-9Pa
Ready to start
pressure(Note 1)
6.7 Pa or less 1.3 Pa or less
Capacity 38L
Maximum heating
temperature
250℃
Inlet φ203ICF
Current input terminal 954-7281
Element (replaceable) 915-9520 (×4) 915-9510 (×4)
Magnet 912-7002 (x2) included
Weight 120kg
400L/s Noble Pump, 500L/s Ion Pump

800L/s Noble Pump, 1000L/s Ion Pump

Pump Name 800L/s Nobel Pump 1000L/s Ion Pump
Type 912-9110 912-7190 912-9100 912-7195
Pumping speed (N2 gas) 800L/s 1000L/s
Operating range(Note 1) 10-2 to 10-9Pa 10-3 to 10-9Pa
Ready to start
pressure(Note 1)
1.3×10-1 Pa or less 1.3×10-2 Pa or less
Capacity 106L
Maximum heating
temperature
250℃
Inlet φ326CS flange φ356ICF φ326CS flange φ356ICF
Current input terminal 954-7281
Element (replaceable) 912-9520 (×8) 915-9510 (×8)
Magnet 912-7003 (×2) included
Weight 257kg
800L/s Noble Pump, 1000L/s Ion Pump