POWER Series Cryo Pump

POWER Series Cryo Pump
High performance cryo pump having 8 to 12 inch intake diameter (compact)

The POWER series cryo pump is a high performance cryo pump that reduces regeneration/startup time to help increase vacuum equipment productivity and utilization, provides high pumping capacity, excellent pumping performance and improved temperature stability during multi-operation.

POWER Series Cryo Pump High performance cryo pump having 8 to 12 inch intake diameter (compact)

Features

  1. Enables safe and high speed regeneration without heater
  2. POWER startup and stability (excellent startup characteristic and temperature stability)
  3. Low vibration
    Average vibration acceleration is less than 1/10 compared to our previous product.

Applications

  • Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment)
  • Electronic component manufacturing equipment
  • Vacuum evaporation systems
  • Vacuum furnaces, space chambers
  • Accelerators
  • Various high vacuum equipment

Specifications

Pump Type P-080C P-081C P-081CL P-082C P-083C P-100CL P-101C P-101CL Remarks
Diameter 8inch 8inch 8inch 8inch 8inch 10inch 10inch 10inch
Shape Vertical Vertical Horizontal Vertical Vertical Horizontal Vertical Horizontal  
Pumping
speed
(L/S)
Nitrogen 1,500 1,500 1,500 1,500 1,500 2,400 2,400 2,400  
Argon 1,300 1,300 1,300 1,300 1,300 2,000 2,000 2,000  
Hydrogen 1,000 2,500 2,200 1,000 1,000 3,000 3,800 3,700  
Water 4,000 4,000 4,000 4,000 4,000 6,400 6,400 6,400  
Maximum pumping
flow(Pa·m3/s)
1.5 1.2 1.2 1.5 1.5 1.0 1.0 1.0  
Maximum gas
instantaneous
tolerance(Pa·m3)
18.0 18.0 18.0 18.0 18.0 18.0 18.0 18.0  
Startup time(min) 45 50 65 45 50 80 70 80 *1
Regeneration
(heat-up)
time(min)
30 30 30 30 35 40 35 45 *1
Startup
regeneration
time(min)
75+α 80+α 95+α 75+α 85+α 120+α 105+α 125+α *1
Pumping
capacity
(Pa·m3)
Argon 80,000 80,000 80,000 150,000 190,000 140,000 160,000 140,000 *2
Hydrogen 1,300 1,800 1,600 1,300 1,300 1,300 2,000 1,800  
Ultimate
temperature(K)
15 or less  
Ultimate
pressure(Pa)
Approx. 10-7  
Maximum heating
temperature(℃)
70  
Ambient
temperature
range(℃)
10 to 35  
Recommended
maintenance
interval(h)
Within 16,000h  
Weight (kg) 22 22 22 23 24 25 24 25  
Number
of
operable
units
P-421CA 1 1 1 1 1 1 1 1 *3
P-875CA 3 3 3 3 3 3 3 3 *3
Pump Type P-120C P-120CL P-121C P-121CL P-122C Remarks
Diameter 12inch 12inch 12inch 12inch 12inch
Shape Vertical Horizontal Vertical Horizontal Vertical  
Pumping speed(L/S) Nitrogen 4,000 4,000 4,000 4,000 4,000  
Argon 3,200 3,200 3,200 3,200 3,200  
Hydrogen 3,600 3,000 6,000 5,000 3,000  
Water 9,000 9,000 9,000 9,000 9,000  
Maximum pumping flow (Pa·m3/s) 1.0 1.0 1.0 1.0 1.0  
Maximum gas instantaneous tolerance(Pa·m3) 18.0 18.0 18.0 18.0 18.0  
Startup time(min) 60 90 70 100 60 *1
Regeneration(heat-up) time(min) 35 40 40 50 30 *1
Startup regeneration time(min) 95+α 130+α 110+α 150+α 90+α *1
Pumping capacity (Pa·m3) Argon 260,000 200,000 260,000 200,000 400,000 *2
Hydrogen 1,600 1,400 2,400 2,200 1,600  
Ultimate
temperature(K)
15 or less  
Ultimate pressure(Pa) Approx. 10-7  
Maximum heating temperature(℃) 70  
Ambient temperature range(℃) 10 to 35  
Recommended maintenance interval(h) Within 16,000h  
Weight (kg) 29 29 29 30 29  
Number of operable units P-421CA 1 1 1 1 1 *3
P-875CA 3 3 3 3 3 *3