Crystal Gauge M-320XG

Crystal Gauge M-320XG

Enables wide range highly reliable measurement from atmospheric pressure to 1×10-1Pa.

Provides excellent repeatability and constant measurement near atmospheric pressure through the use of phenomenon where crystal oscillator's resonant impedance changes according to pressure.

It can be used as a chamber atmospheric pressure vent detection pressure switch or for process pressure measurement.

Crystal Gauge M-320XG

Features

  1. Wide measurement range
    Enables measurement with excellent repeatability from atmospheric pressure to 1×10-1Pa.
  2. High stability
    Crystal gauge is a vacuum gauge with no source of heat (filament).
    Enables safe handling without affecting process gas.
  3. Compact and ultra-light weight
    The controller fits in the palm of your hand weighing only 200g.

Applications

  • Roughing pump pressure measurement of various vacuum equipment
  • Various process pressure measurement
  • Detection pressure switch for chamber vent, etc.
  • Other pressure measurements from atmospheric pressure to 10-2Pa

Specifications

Type M-320XG
Measurement ball XG-1 Crystal Gauge Head (exclusive for crystal gauge)
Pressure monitor range 1×10-2Pa to atmospheric
Measurement pressure range 1×10-1Pa to atmospheric
Gas type selections N2, Ar, H2, Air
Analog output
(pressure signal)
0 to 10VDC: Set output format of following items with digit switch
1. Log output
2. Multiple output
3. Linear output Full scale pressure range selectable (1×101, 1×102, 1×103, 1×104, 1×105Pa)
Remote I/O INPUT 1. Set gas type switch with 2 bit signal
2. Zero adjustment
3. ATM setting
OUTPUT 2 set point output
Set point 2 points (photocoupler output, fixed hysteresis)
Set with digit switch (SP1, SP2 mantissa, exponent)
Operating environment 5℃ to 50℃ (including controller)
Gauge head only withstand temperature 150℃ MAX
Zero adjustment PUSH switch or software adjustment by remote I/O
Full scale adjustment Adjustment by trimmer
I/O connector Dsub 15P
Display LED ×3 (PWR/ALM (Green/Red), SP1-Status (Green), SP2-Status (Green))
Power requirements 22 to 33VDC, (maximum power consumption 2W)
Dimensions (mm) 72.5H×102W×44.5D (excluding gauge head)
Weight 200g (excluding gauge head)
Sensor attaching flange NW16, NW25, φ34ICF, φ70ICF

Dimensions

 Dimensions

Parts Number

Parts Number Model Description Remarks Code
89-2282 M-320XG A-NET Crystal Gauge Controller Only Controller 21560
89-4020 M-320XG/N16 A-NET Crystal Gauge Controller + Crytal Gauge (w NW16) 21561
89-4021 M-320XG/N25 A-NET Crystal Gauge Controller + Crytal Gauge (w NW25) 21562
0160-01365 M-320XG/C34 A-NET Crystal Gauge Controller + Crytal Gauge (w PY34ICF) 21580
0160-01373 M-320XG/C70 A-NET Crystal Gauge Controller + Crytal Gauge (w PY70ICF) 21581
0160-01357,M M-320XG/VG70 A-NET Crystal Gauge Controller + Crytal Gauge (w PY70VG) 21582
H21-03280 XG-1/NW16 Crystal Gauge Head with NW16 21575
H21-03281 XG-1/NW25 Crystal Gauge Head with NW25 21576
0161-17920 XG-1/ICF34 Crystal Gauge Head with PY34ICF 21577
0161-17938 XG-1/ICF70 Crystal Gauge Head with PY70ICF 21578
0161-44888 XG-1/VG70 Crystal Gauge Head with PY70VG 21579
89-2314 M-390 A-NET Display Unit for M-320XG 21563
H21-03614 M-391 A-NET Display Unit w/o Cable 21583
89-2316 390-05CR A-NET Cable for Display Unit (for Crystal Gauge 5M) 21565
0161-37475 390-03BA A-NET Cable for Display Unit (for Ion Gauge 3M) 21567
0161-37491 390-10BA A-NET Cable for Display Unit (for Ion Gauge 10M) 21568
0161-37506 390-15BA A-NET Cable for Display Unit (for Ion Gauge 15M) 21569
0161-37514 390-20BA A-NET Cable for Display Unit (for Ion Gauge 20M) 21570
0161-37409 390-03CR A-NET Cable for Display Unit (for Crystal Gauge 3M) 21571
0161-37425 390-10CR A-NET Cable for Display Unit (for Crystal Gauge 10M) 21572
0161-37433 390-15CR A-NET Cable for Display Unit (for Crystal Gauge 15M) 21573
0161-37441 390-20CR A-NET Cable for Display Unit (for Crystal Gauge 20M) 21574