Wide Range Ionization Vacuum Gauge M-431HG

Wide Range Ionization Vacuum Gauge M-431HG

M-431HG is a space-saving light weight vacuum control power supply made exclusively for miniature gauges.

Wide Range Ionization Vacuum Gauge M-431HG CE_marking RoHS

Features

  1. Standard equipped with external I/O and RS-232C communication functions
  2. Input voltage is wide voltage
  3. Conformity with CE marking and RoHS

Applications

  • Automated vacuum equipment pressure measurement
  • Sputtering process pressure measurement and control
  • Multi-chamber system pressure measurement
  • General vacuum equipment pressure measurement

Specifications

Type M-431HG
Pressure display range 0.01×10-7 to 13.2×100 Pa ※1
Pressure display Digital, measurement range auto switch
Set point Standard equipped with 2 points (with hysteresis)
D/A output Switch between Log or combined output (0 to 10V)
Analog output 0 to 10V (APC compatible output)
External control function
(Remote control)
INPUT Filament ON/OFF, Parameter LOCK,
Filament switching, Degas ON/OFF, Range Hold
OUTPUT Set point 1, 2, Filament ON/OFF status
Degas status, Filament 1/2 status
Communication function RS232C standard equipped (9600, 4800, 2400, 1200bps)
Dimensions (mm), Weight 104W×99H×296D 1.2Kg
Power consumption 50VA 90 to 240VAC 50/60Hz ※2
Emission current 10μA, 100μA, 1mA (auto switched, or fixed)
Degas Grid electrical heating method, 3 min timer
Filament switching Key and remote I/O control
Filament protection Filament OFF at 13.3×100 Pa
Standard configuration Vacuum gauge main unit (measurement ball and cables not included)
Conformity CE marking, RoHS

※1 About the measurement range, please refer to a section of miniature gauge MG-2.
※2 The cable included with the M-431HG is for use at 100V. Please contact us when using at 200V.

Dimensions

 Dimensions

Parts Number

Parts Number Model Description Remarks Code
0161-55554 M-431HG Wide Range Ion Gauge Controller for Miniature Gauge only、w/o Cable / Gauge Head 21685
H21-03430 430-901 Cable for Miniature B-A Gauge (5M) for MG-2/2F, Standard Cable 21672
H21-03432 430-902 Cable for Miniature B-A Gauge (10M) for MG-2/2F 21673
H21-03433 430-903 Cable for Miniature B-A Gauge (15M) for MG-2/2F 21674
0161-24189 430-904 Cable for Miniature B-A Gauge (20M) for MG-2/2F 21675
0161-44820 430-911 Bakable Cable for MG-2 (5M) Maximum Usable Temperature Range 250゚C 21676
0161-44838 430-912 Bakable Cable for MG-2 (10M) Maximum Usable Temperature Range 250゚C 21677
0161-36966 430-913 Bakable Cable for MG-2 (15M) Maximum Usable Temperature Range 250゚C 21678
0161-36974 430-914 Bakable Cable for MG-2 (20M) Maximum Usable Temperature Range 250゚C 21679