Wide Range Ionization Vacuum Gauge M-833HG

Wide Range Ionization Vacuum Gauge M-833HG

M-833HG is a control unit made exclusively for miniature B-A gauges. Optional expansion boards supporting versatile gauge and data output are available. The combination of miniature B-A gauge and TC gauge (option) and the use of auto filament that performs auto gauge switching enables highly accurate vacuum measurement from atmospheric pressure to ultra high vacuum. Best suited for installation on high to ultra high vacuum equipment.

Wide Range Ionization Vacuum Gauge M-833HG CE_marking RoHS

Features

  1. Variety of external control functions enabling fully remote operation.
  2. Standard equipped with two set points.
  3. Highly expandable supporting up to four option boards. (Note: GP-IB option not supported.)
  4. Conformity with CE marking and RoHS

Applications

  • Automated vacuum equipment pressure measurement
  • Sputtering process pressure measurement and control
  • Multi-chamber system pressure measurement
  • General vacuum equipment pressure measurement

Specifications

Type M-833HG
Measurement ball Miniature gauge MG-2 Series
Pressure display range 0.1×10-7 to 1.32×101 Pa ※1
Pressure display Measurement range auto switch
Set point Standard equipped with 2 points (open collector)
D/A output 0 to 10V: Mantissa output, Exponent output
0 to 11V: Combined output or Log output
Analog output
(Electron meter output)
When set to APC mode (0.1 to 2.5V)
When set to normal mode (0.1 to 1.6V)
External control function
(Remote control)
INPUT Filament ON/OFF
Degas ON/OFF
etc. (6 types of external control functions)
OUTPUT 6 types of status signal output
Special function APC compatible: Range hold function
Electron meter output function
Dimensions and Weight H99×W209×D330, 1.9kg (When no option boards are installed)
Power requirements 100 to 240VAC ※2
100VA or less, 50/60Hz
Emission current 10μA, 100μA, 1mA auto switched or fixed
Degas Grid electrical heating method
Filament switching Key and remote I/O control
Filament protection Over range setting or emission current ±50% variation
Standard configuration Vacuum gauge main unit (measurement ball and cables not included)
Conformity CE marking, RoHS

※1 About the measurement range, please refer to a section of miniature gauge MG-2.
※2 The cable included with the M-833HG is for use at 100V. Please contact us when using at 200V.

Dimensions

 Dimensions

Parts Number

Parts Number Model Description Remarks Code
0161-63816 M-833HG Wide Range Ion Gauge Controller for Miniature Gauge only、w/o Cable / Gauge Head 21734
0161-68604 722-TC TC Gauge Board 21487
0161-70465 722-BCD BCD Output Board for M-722HG/M-822HG/M-922HG w Connecter 21483
0161-70423 722-CM CM.XTL Gauge Board for M-722HG/M-822HG/M-922HG w Connecter 21483
P23-04131 722-SPB Set Points Board for M-722HG/M-822HG/M-922HG w Connecter 21480
H21-02971 722-232C RS-232C Board for M-722HG/M-822HG/M-922HG w Connecter 21487
H21-02966 722-GPIB RS-232C Board for M-722HG/M-822HG/M-922HG w/o Cable 21484
P23-01064 831-323 Gauge Selector Box for MG-2 for M-832HG, w Cable (to Unit 5M, to Gauge 2M)  21775
H21-03430 430-901 Cable for Miniature B-A Gauge (5M) for MG-2/2F, Standard Cable 21672
H21-03432 430-902 Cable for Miniature B-A Gauge (10M) for MG-2/2F 21673
H21-03433 430-903 Cable for Miniature B-A Gauge (15M) for MG-2/2F 21674
0161-24189 430-904 Cable for Miniature B-A Gauge (20M) for MG-2/2F 21675
0161-44820 430-911 Bakable Cable for MG-2 (5M) Maximum Usable Temperature Range 250゚C 21676
0161-44838 430-912 Bakable Cable for MG-2 (10M) Maximum Usable Temperature Range 250゚C 21677
0161-36966 430-913 Bakable Cable for MG-2 (15M) Maximum Usable Temperature Range 250゚C 21678
0161-36974 430-914 Bakable Cable for MG-2 (20M) Maximum Usable Temperature Range 250゚C 21679