Ionization Vacuum Gauge M-723HG, M-823HG, M-923HG

Ionization Vacuum Gauge M-723HG, M-823HG, M-923HG

This is a series of most common B-A ionization vacuum gauges with abundant expansion board selection supporting a variety of gauges.

Standard equipped with remote control function and range hold function necessary for process control of vacuum equipment. A type capable of controlling communication with CC-Link is also available.

The M-823HG enables accurate measurement from atmospheric pressure to high vacuum range with a single device.

Ionization Vacuum Gauge M-723HG, M-823HG, M-923HG

Features

  1. Automatically switched pressure range.
  2. Pressures and messages are displayed on LCD.
  3. Variety of external control functions enabling fully remote operation.
  4. Standard equipped with two set points.

Applications

  • Automated vacuum equipment pressure measurement
  • Sputtering process pressure measurement and control
  • Multi-chamber system pressure measurement

Specifications

Type M-723HG M-823HG M-923HG
Measurement ball UGD-1S B-A Gauge Ball BRG-1B Wide Range B-A Gauge Ball NIG-2F/NIG-2TF
Nude Ion Gauge Ball
Pressure
measurement
range (Pa)
5 range auto switch
10-2, 10-3, 10-4, 10-5, 10-6
7 range auto switch
10-0, 10-1, 10-2, 10-3, 10-4, 10-5, 10-6
8 range auto switch
10-2, 10-3, 10-4, 10-5, 10-6, 10-7, 10-8, 10-9
Measurement
range
switching
Auto switching (range hold possible)
Degas Grid electrical heating method Electron bombardment method
Filament switching Can be switched from the front panel or by external control input (excluding M823HG)
Filament protection Turns off automatically if there is a problem in the fluctuation range of pressure, ion current, or emission current.
Analog output D/A output (mantissa D/A output, exponent D/A output, combined D/A output)
analogy raw output (electrometer output)
I/O remote INPUT Filament ON/OFF input,
degas ON/OFF input,
filament inhibit input,
range hold 1 input,
range hold 2 input,
filament switch input,
gauge 1/2 switch input (when using gauge select option)
OUTPUT Filament ON/OFF output,
degas ON/OFF output,
remote/local output,
set point output (2 points),
gauge 1/2 select output (when using gauge selector option),
power ON/OFF output,
filament 1/2 output,
alarm output
Set point Standard equipped with 2 set points (open collector)
Dimensions (mm) H99×W209×D330
Power requirements 100VAC±10%2A, 50/60Hz (also supports 115/200/230VAC)
Weight 5.4kg (When no option boards are installed)
Standard configuration Vacuum gauge main unit (measurement ball and cable are not included)

Dimensions

 Dimensions

Parts Number

Parts Number Model Description Remarks Code
0161-80355 M-723HG Ion Gauge JIS Rack Type、 for UGD-1S Gauge Head 21704
0161-80486 M-813HG Wide Range Ion Gauge JIS Rack Type、 for BRG-1B Gauge Head 21728
0161-71445 M-923HG UHV Vacuum Gauge JIS Rack Type、 for NIG-2F Gauge Head 21734
P13-06804 921-303 Gauge Selector Box (for M-922HG) Cable for M-922HG (w Cable to Unit 5M・to Gauge 2M) 21745
P13-08435 721-303 Gauge Selector Box (for M-722HG/M-822HG) Cable for M-722HG/M-822HG (w Cable to Unit 5M・to Gauge 2M) 21764
H21-01490 921-801 Rack Mount Panel forM-722HG/M-822HG/M-922HG 21765
0161-68604 722-TC TC Gauge Board 21487
0161-70465 722-BCD BCD Output Board for M-722HG/M-822HG/M-922HG w Connecter 21483
0161-70423 722-CM CM.XTL Gauge Board for M-722HG/M-822HG/M-922HG w Connecter 21483
P23-04131 722-SPB Set Points Board for M-722HG/M-822HG/M-922HG w Connecter 21480
H21-02971 722-232C RS-232C Board for M-722HG/M-822HG/M-922HG w Connecter 21487
H21-02966 722-GPIB RS-232C Board for M-722HG/M-822HG/M-922HG w/o Cable 21484
9-3428 820-901 Cable for B-A Gauge (5M) for M-722HG/M-822HG, 5M 21645
9-3319 820-902 Cable for B-A Gauge (10M) for M-722HG/M-822HG, 10M 21646
P13-14966 820-903 Cable for B-A Gauge (15M) for M-722HG/M-822HG, 15M 21647
P13-14967 820-904 Cable for B-A Gauge (20M) for M-722HG/M-822HG, 20M 21648
9-3429 921-901 Cable for Nude Ion Gauge (5M) for M-922HG, 5M 21750
P13-14128 921-902 Cable for Nude Ion Gauge (10M) for M-922HG, 10M 21751
P13-14129 921-903 Cable for Nude Ion Gauge (15M) for M-922HG, 15M 21752
P13-14130 921-904 Cable for Nude Ion Gauge (20M) for M-922HG, 20M 21753
0161-36411 921-911 Bakable Cable for Nude Ion Gauge (5M) for M-922HG, Bakable 5M 21754
P13-22893 921-912 Extention Cable for Nude Ion Gauge (5M) 921-911 for Extention , 5M(total 10m) 21755
0161-36932 921-913 Extention Cable for Nude Ion Gauge (10M) 921-911 for Extention , 10M(total 15m) 21756
0161-36940 921-914 Extention Cable for Nude Ion Gauge (15M) 921-911 for Extention , 15M(total 20m) 21757