Miniature Gauge MG-2/MG-2M/MG-2F MG-2/WF

Miniature Gauge MG-2/MG-2M/MG-2F MG-2/WF

A miniature gauge is a small gauge ball made of metal.

It enables pressure measurement from ultimate pressure to process pressure of sputters (measurement around 1Pa) with a single gauge.

Connects to gauge adapter (O-ring insertion type). (φ15mm, φ18mm)

NW16/25, φ34ICF, and φ70ICF type are available.

Miniature Gauge MG-2/MG-2M/MG-2F MG-2/WF

Specifications

Type MG-2 MG-2M MG-2I/
NW16,25
MG-2I/
φ34ICF,φ70ICF
MG-2F MG-2/WF
Body material SUS304
Maximum
pressure
measurement(Note 1)
13Pa 1.3×10-1(Note 3)Pa
Minimum
pressure
measurement(Note 2)
Approx. 10-6Pa Approx. 10-7Pa Approx. 1.0×10-5(Note 4)Pa
Sensitivity 0.045Pa-1
Filament Two filaments built-in
Filament material: Yttria coated iridium wire
Two filaments built-in
Filament material: Tungsten
Measurement ball capacity Approx. 12cc
Power
power
Filament
Grid degas
2.3W
1.0W
2.5W
1.0W
Degassing method Grid electrical heating
Attachment method Can be welded to φ15 gauge adapter or various flanges φ18 gauge adapter NW25, NW16 φ34ICF, φ70ICF Connect to φ70ICF flange Can be welded to φ15 gauge adapter or various flanges

Dimensions

Dimensions

Various flange installation example

Various flange installation example

Parts Number

Parts Number Model Description Remarks Code
0160-01234 MG-2 Miniature B-A Gauge Head Connecter φ15 Type 21160
0160-01284 MG-2M Miniature B-A Gauge Head Connecter φ18 Type 21162
H21-03193 MG-2I/NW16 Miniature B-A Gauge Head with NW16 21163
H21-03194 MG-2I/NW25 Miniature B-A Gauge Head with NW25 21164
H21-03195 MG-2I/ICF34 Miniature B-A Gauge Head with ICF34 21165
P25-04306 MG-2I/ICF70 Miniature B-A Gauge Head with ICF70 21166
0160-01268 MG-2F Miniature B-A Gauge Head Connecter φ70ICF Type 21161
0160-02222 MG-2F/WF Miniature B-A Gauge (Tungsten Type) 21167
89-4367 MG-2WF Miniature B-A Gauge Head Tungsten Filament Type、Connecter φ15 Type 21170
0161-02640 MG-2WF/N25 Miniature B-A Gauge Head W filament with NW25 Tungsten Filament Type、Connecter φ15 Type 21176