Vacuum Gauge ball

Vacuum Gauge ball

Shultz Gauge LG-11S

This is an ionization vacuum gauge ball for pressure measurement between 100Pa and 10-2Pa.

LG-11S uses thoria coated iridium filament to provide low operating temperature and extended product life. The connection with the vacuum equipment uses a φ15 adapter or is glass sealed to a glass adapter with φ70 ICF.

Shultz Gauge  LG-11S

B-A Gauge UGD-1S

This is a sealed glass tube type B-A ionization vacuum gauge measurement ball for pressure measurement in the range under 10-2Pa.

UGD-1S is a Kovar glass sealed B-A gauge. The grid is made of tungsten and degassing is performed by electrical heating. Therefore, pressure can be measured even during degassing.

B-A Gauge UGD-1S

Wide Range B-A Gauge BRG-1B

This is a B-A gauge with the high pressure end measurement range expanded. Degassing is performed by grid electrical heating similar to UGD-1S. A thoria coated iridium filter is used to enable high pressure measurement.

The connection with the vacuum equipment uses a φ15 adapter or is glass sealed to a glass adapter with φ70 ICF.

Wide Range B-A Gauge BRG-1B

Nude Ion Gauge NIG-2F/NIG-2TF

This gauge directly mounts a B-A type electrode on a flange. This is directly attached to the equipment making it suitable for ultra-high vacuum measurement without error due to feed through. Platinum-clad molybdenum wire is used for grid to minimize error due to gas contamination.

NIG-2F uses tungsten filament. In addition, NIG-2TF uses yttria coated filament which lowers the operating temperature, suppresses degassing, and improves ultra-high vacuum measurement.

Nude Ion Gauge NIG-2F/NIG-2TF

Pirani Gauge PG-150

This gauge can be used from atmospheric pressure and is installed with φ15 adapter. A Pirani gauge that can be baked at standard heatproof temperature of 80℃ is also available (200℃ maximum heating temperature with connectors removed)

Pirani Gauge PG-150

Thermocouple Gauge TG-550C

This gauge can be used from atmospheric pressure and is installed with φ15 adapter. (150℃ maximum heating temperature with connectors removed)

Thermocouple Gauge TG-550C

Specifications

Shultz Gauge LG-11S/B-A Gauge UGD-1S/Wide Range B-A Gauge BRG-1B

Type LG-11S UGD-1S BRG-1B
Gauge Type Shultz Gauge B-A Gauge Wide Range B-A Gauge
Shape Glass tube
Connection with
measured vacuum
chamber
φ15 gauge port (O ring)
Recommended
measurement
range
10-2 to 100 Pa 10-6 to 0.1 Pa 10-6 to 10 Pa
Standard
sensitivity
0.0038Pa-1with respect to air 0.075Pa-1 with respect to N2
X ray limit <10-4Pa Approx. 1.3×10-8Pa
Baking temperature 400℃(150℃ or less with O ring seal)
Material Filament Thoria-coated iridium (×1) Tungsten (×2) Thoria-coated iridium (×1)
Body Kovar glass (vacuum sealed) Tungsten glass (open)
Supported vacuum gauge
power supply
NI-10D* M-722HG·NI-10D* M-823HG
Applications High pressure
(100Pa to 102Pa)
measurement gauge, sputter, etc.
General vacuum use B-A gauge, sputter etc. measurable up to high pressure (10Pa)

Nude Ion Gauge NIG-2F/NIG-2TF

Type NIG-2F
954-7902
NIG-2TF
954-7903
Gauge Type Nude Type B-A
Shape Nude Type
Connection with
measured vacuum
chamber
φ70ICF
Recommended
measurement
range
10-9 to 10-2Pa
Standard sensitivity 0.19Pa-1 with respect to N2
X ray limit Approx. 2.7×10-9Pa
Baking temperature 400℃
Filament Filament material: Tungsten (×2) Filament material: Yttria-coated iridium (×2)
Supported
vacuum gauge
power supply
M-923HG·NI-10D*
Applications Up to 10-9Pa
Ultra-high vacuum equipment (for bakable equipment)

Pirani Gauge PG-150/Thermocouple Gauge TG-550C

Type PG-150
Gauge Type Pirani Gauge
Shape Metal vessel
Connection with
measured vacuum
chamber
φ15 gauge port (O ring)
Measurement range 10-1 to 133Pa
Material Body Stainless steel (SUS-304)
Supported
vacuum gauge
power supply
MPG-011 MPG-012
Applications Measurement during roughing pump
Type TG-550C
Gauge Type Thermocouple Gauge
Shape Metal vessel
Connection with
measured vacuum
chamber
φ15 gauge port (O ring)
Measurement range 10-1 to 200Pa
Material Body Stainless steel (SUS-304)
Supported
vacuum gauge
power supply
M-012DM
M-722HG/822HG/833HG/922HG
Applications Measurement during roughing pump

Dimensions

Shultz Gauge LG-11S/B-A Gauge UGD-1S/Wide Range B-A Gauge BRG-1B

Dimensions

Nude Ion Gauge NIG-2F/NIG-2TF

Dimensions

Pirani Gauge PG-150/Thermocouple Gauge TG-550C

Dimensions

Parts Number

Parts Number Model Description Remarks Code
793-0467 LG-11S B-A Gauge Head Socket Type 21100
783-5285 UGD-1S B-A Gauge Head Socket Type 21121
VMT-9304 952-7850 GD-1S Vertical Type B-A Gauge Head w φ70 ICF 21130
VMT-9305 952-7851 UGD-1S Wide Type B-A Gauge Head w φ70 ICF 21131
0161-35017 UGD-1S Open Type (80MM Cut) 21134
P25-05688 BRG-1B Wide Range B-A Gauge Head 21225
P25-02463 952-7860 BRG-1 Vertical Type Wide Range B-A Gauge Head φ70ICF with Glass Adapter 21133
P21-02260 952-7861 BRG-1 Wide Type Wide Range B-A Gauge Head φ70ICF with Glass Adapter 21132
783-2411 952-7902 NIG-2F Nude Ion Gauge Head Canon Plug Type 21120
A23-04054 NIG-2TF Nude Ion Gauge Yttria Coat Filament for NIG-2F 21119
A26-07217 Yttria Coat Filament Kit for NIG-2TF 21142
P21-01959 954-7904 NIG-2F Nude Ion Gauge Head (Flangeless) 21118
794-0609 954-7905 Filament Kit for Nude Ion Gauge for NIG-2F 21140
803-0072 PG-150 Pirani Gauge Head Main Body SUS made 21040
P21-01422 PG-150/ICF34 Pirani Gauge Head (w φ34ICF) PG-150 with φ34ICF 21042
P21-03056 PG-150/ICF70 Pirani Gauge Head (w φ70ICF) PG-150 with φ70ICF 21041
0161-68109 TG-550C Thermo-Couple Gauge Head 21015
0161-68117 TG-550B Thermo-Couple Gauge Head 21025
0160-07905 TG-550/ICF34 Thermo-Couple Gauge Head (w φ34ICF) TG-550 with φ34ICF 21003
0160-07913 TG-550/ICF70 Thermo-Couple Gauge Head (w φ70ICF) TG-550 with φ70ICF 21002