Capacitance Diaphragm Gauge M-342DG

Capacitance Diaphragm Gauge M-342DG

The capacitance gauge M-342DG is a diaphragm gauge that enables accurate, stable pressure measurement with minimum zero adjustment.

This is achieved using a small silicon MEMS chip as the pressure sensor unit to minimize the influence from the outside environment such as changes in temperature, vibrations, and atmospheric pressure.

Capacitance Diaphragm Gauge M-342DG CE_marking RoHS

Features

  • High precision, stable pressure measurement
    ・Excellent zero point stability.
    ・Has low temperature dependence providing excellent stability without the need of a temperature
       adjustment mechanism.
    ・Excellent anti-vibration noise performance.
  • Compact and low power consumption
    ・200g, W46mm × H49mm × L70mm compact, lightweight.*1
    ・Power consumption 0.5W.

    *1:Size and weight of the coupling NW16 specifications

Applications


    Supports a wide range of general industy applications such as medical and food in addition to semiconductor manufacturing equipment, panel display munufacturing equipment, and other vacuum equipment.*2

      *2:Not suitable for applications where corrosive gas is used.
           Please consult us for details.

Specifications

Type M-342DG
-1D -1N -11 -12 -13
Full scale pressure(Pa)  13.33  133.3 1.333k 13.33k 133.3k
                              (Torr) 0.1 1 10 100 1000
Accuracy(% of reading) 0.20(at 23℃)
Zero temperature
drift coefficient(% of F.S./℃)
0.01 0.005 0.002
Span temperature
drift coefficient(% of reading/℃)
0.01 0.005
Resolution(% of Full-scale) 0.01 0.005
Lowest Reading(% of Full-scale) 0.01
Lowest Suggested Pressure for
Reading(% of Full-scale)
0.05
Lowest Suggested Pressure for
Control(% of Full-scale)
0.5
Response time(msec) 100 30
pressure limit(Pa) 200 kPa(absolute pressure) However, 130 kPa(absolute pressure)for
M-342DG-1D(for NW16 & NW25, inner area must not be at
positive pressure)
Input voltage(VDC) +13.5~26.4
Power consumtion(W) 0.5 or less
Signal output(VDC) 0 to 10
Operating temperature(℃) 0 to 50
Storage temperature(℃) -20 to 70(not operating)
Maximum cable length(m) 100(0.3mm2)
Zero points adjustment methods push switch,remote input
Connector type D-sub 9 pin male(mating screw:#4-40inch)
Materials exposed to vacuum Si,Glass,SUS304,sus316,Fluorine Rubber
Flange shape NW16,NW25,8-VCR,φ70ICF
Conformity CE marking, RoHS, IP40
Security Export Control Regulation Not applicable
Display M-601GC(1ch)、M-603GC(3c)

Dimensions

Capacitance Diaphragm Gauge M-342DG

Parts Number

Parts Number Model Description Remarks Code
0160-12049 M-341DG-1D-N16 Capacitance Gauge(13.3Pa) Coupling: NW16 22735
0160-12057 M-341DG-1D-N25 Coupling: NW25 22736
0160-12065 M-341DG-1D-C70 Coupling: φ70ICF 22737
0160-12073 M-341DG-1D-VCR Coupling: 8-VCR female 22738
0160-11645 M-341DG-1N-N16 Capacitance Gauge(133Pa) Coupling: NW16 22710
0160-11653 M-341DG-1N-N25 Coupling: NW25 22711
0160-11661 M-342DG-1N-C70 Coupling: φ70ICF 22712
0160-11679 M-342DG-1N-VCR Coupling: 8-VCR female 22713
0160-11459 M-342DG-11-N16 Capacitance Gauge(1.33kPa) Coupling: NW16 22715
0160-11467 M-342DG-11-N25 Coupling: NW25 22716
0160-11475 M-342DG-11-C70 Coupling: φ70ICF 22717
0160-11483 M-342DG-11-VC8 Coupling: 8-VCR female 22718
0160-11140 M-342DG-12-N16 Capacitance Gauge(13.3kPa) Coupling: NW16 22720
0160-11158 M-342DG-12-N25 Coupling: NW25 22721
0160-11077 M-342DG-12-C70 Coupling: φ70ICF 22722
0160-11166 M-342DG-12-VC8 Coupling: 8-VCR female 22723
0160-11093 M-342DG-13-N16 Capacitance Gauge(133kPa) Coupling: NW16 22725
0160-11108 M-342DG-13-N25 Coupling: NW25 22726
0160-11116 M-342DG-13-C70 Coupling: φ70ICF 22727
0160-11124 M-342DG-13-VC8 Coupling: 8-VCR female 22728
Catalog DownloadPDF:509KB


 In the United States, please contact CANON U.S.A. INC. Email:Please mail to this address