Ultra-High Vacuum Type-L All-metal Valve

Ultra-High Vacuum Type-L All-metal Valve

This is an all-metal ultra-high vacuum type-L valve that can be used up to 10-8Pa or lower. It can be baked up to 400℃ or 450℃, making it suitable as a valve for ultra-high vacuum equipment that undergo hard bakes.

Ultra-High Vacuum Type-L All-metal Valve

Features

  1. For ultra-high vacuum range
    All-metal valve that can be used in ultra-high vacuum range of up to 10-8Pa or lower.
  2. Capturing seal structure
    For the valve seal, a Capturing seal structure, which is highly reliable similar to flange, is adopted.
  3. High heat tolerance
    Can be baked up to 400℃ or 450℃.
  4. Easy to change the gaskets

Specifications

Ultra-High Vacuum Type-L All-metal Valve(Type:951-7148)

Type 951-7148
Operating vacuum range Atmospheric to 10-8Pa or less
Leak 6.7×10-11Pa·m3/sec or less
Fully open conductance 4L/sec
Allowable heating temperature 400℃
Initial sealing torque Approx. 15.7N·m
Maximum sealing torque 23.5N·m
Main component material Body:SUS-304
Bellows:SUS-304
Valve sealing gasket:Copper alloy
Bonnet gasket:SUS-321 Silver Plated Metal
Hallow O ring
Connection flange φ34ICF flange
Weight 0.7kg
Applicable torque wrench
(Option)
460F (Angular drive dimension9.53mm)
(JIS B4650 Plate Type Nominal 450 Equivalent)
Attachments Gasket remover:1S
Handle:×1
Nominal 2.5 hexagonal wrench:×1
Nominal 4 hexagonal wrench:×1
Wire brush:×1
Spare washer:Large, small ×1 each Total 2
Spare gasket:×1

Ultra-High Vacuum Type-L All-metal Valve(Type:951-7150 / 951-7152)

Type 951-7150 951-7152
Operating vacuum range Atmospheric to 10-8Pa or less
Leak 6.7×10-11Pa·m3/sec or less
Fully open conductance 30L/sec 100L/sec
*Allowable heating
temperature
450℃
Initial sealing torque 29.4 to 34.3N·m 78.4 to 127.4N·m
Maximum sealing torque 127.4N·m 225.4N·m
Main component material Body:SUS-304
Bellows:SUS-304
Valve sealing gasket :Copper alloy
Connection flange φ70ICF flange φ114IC flange
Weight 1.6kg 7kg
Applicable torque wrench 1300F (Angular drive dimension12.7mm)
(JIS B4650 Plate Type Nominal 1300 Equivalent)
2800F (Angular drive dimension19.05mm)
(JIS B4650 Plate Type Nominal 2800 Equivalent)
Attachments Handle:×1
Nominal 2.5 hexagonal wrench:×1
Nominal 6 hexagonal wrench:×1
Wire brush:×1
Spare washer:Large, small ×1 each Total 2
Spare gasket:×1
Handle:×1
Nominal 10 hexagonal wrench:×1
BS ball point driver:×1
Wire brush:×1
Spare washer:Large, small ×1 each Total 2
Spare gasket:×1