Quadrupole Mass Spectrometer(Process Gas Monitor) M-080QA-HPM
M-080QA-HPM is a quadrupole mass spectrometer covering wide pressure range of 10-9Pa∼1.3Pa.
Unique technology allows the M-080QA to operate in both pressure areas of high vacuum and sputtering pressure.
M-080QA-HPM can be used to reduce defect rate in production by monitoring the gases of process chambers to find potential problems, such as impurities gas, leakage, etc.
Components
Features
- Seamless measurement from process pressure (1.3Pa) to ultrahigh vacuum
- Detecting H2 with high sensitivity in deposition process
- Long maintenance cycle and low running cost
- Detecting problems in production with various alarm functions
Applications
- Quality control in deposition process
- Residual gas analysis
- Leak check
Specifications
| Model | M-080QA-HPM | ||
|---|---|---|---|
| Basic performance |
Measurement mass range | 1 to 80amu | |
| Operating pressure | 1.3Pa or less | ||
| Minimum Detection Limits | 5ppm(Without H2), H2:100ppm | ||
| Sensitivity (N2) |
FC | 7.5×10-9A/Pa or greater | |
| SEM | 7.5×10-5A/Pa or greater | ||
| Resolution | <1 amu @10% of peak height | ||
| Specifications | Filament | Yttria coated iridium×1 | |
| Baking temperature | 250℃ (Analyzer tube only) | ||
| Connection flange | φ70ICF | ||
| Rated input voltage | 100V to 240VAC | ||
| Weight | Analyzer tube | 1.1kg | |
| Controller | 2.2kg | ||
| Communication interface | RS-232C/485 | ||
| Software | QUADVISION3 / compatible with Windows 7, 8.1, 10 | ||