Equipment

Cluster

• "Adastra" Product family for the manufacturing of semiconductor and electronic devices

  Adastra is a next-generation manufacturing system for semiconductors and electronic devices that int...

  

• Sputtering Equipment NC7900

  NC7900 is sputtering equipment designed for multi-layer deposition processes, such as Magnetic Tunne...

  

• Sputtering Equipment IC7500

  IC7500 is sputtering equipment with extensive mass-production experience for DRAM bit lines. Featuri...

  

• Sputtering Equipment FC7100

  FC7100 is sputtering equipment that has become the de facto standard for high-k metal gate applicati...

  

• Sputtering Equipment EC7400

  EC7400 is sputtering equipment with a high-quality, space-saving design which is the result of our e...

  

• Sputtering Equipment EC7430

  The EC7430 is a dual-cathode sputtering system equipped with advanced plasma control technology for ...

  

• Sputtering Equipment EC7000

  Built on our proven expertise in vacuum and sputtering technologies, the EC7000 offers sputtering eq...

  

• Sputtering Equipment EC7800

  EC7800 is sputtering equipment designed for multi-layer deposition processes, integrating the proven...

  

• Sputtering Equipment IC7200

  IC7200 is sputtering equipment for thin film deposition, mainly applied to semiconductor interconnec...

  

• Sputtering Equipment HC7100

  HC7100 is sputtering equipment designed for multi-layer deposition processes, such as MTJ.

  

• Sputtering Equipment HC7300

  HC7300 is sputtering equipment integrating sputtering and etching modules, and offers mass productio...

  

• Sputtering Equipment EC8100

  EC8100 is sputtering equipment designed for small substrate production, such as LEDs. It supports t...

  

In-line

• Sputtering Equipment ML3000

  ML3000 is an in-line sputtering system for HDD media, featuring high-speed transfer, high deposition...

  

• Sputtering Equipment EL3400

  EL3400 is vertical in-line sputtering equipment. It supports packaging (PLP, WLP) wiring to various ...

  

• Sputtering Equipment EL3000

  EL3000 is in-line sputtering equipment designed for small substrate production, such as LEDs. It su...

  

Batch/Load-lock

• Sputtering Equipment EB1000

  EB1000 is sputtering equipment designed most cost-effective and space-saving in our line-up.

  

• Sputtering Equipment EB1100

  Built on our proven expertise in vacuum and sputtering technologies, the EB1100 offers sputtering eq...

  

Cluster

• Etching Equipment NC8000

  NC8000 is an etching equipment equipped with an ion-beam etching module, enabling one-step etching o...

  

In-line

Batch/Load-lock

Cluster

• Wafer Bonding Equipment BC7300/BC7000

  BC7300/BC7000 is wafer bonding equipment that uses atomic diffusion bonding (ADB) technology, which ...

  

In-line

Batch/Load-lock