Equipment

Cluster

• Milling→Insulator→HARD Bias→Cap Layer Integrated Manufacturing Equipment HC7300

  

• Sputtering Equipment for Magnetic Heads HC7100

  

• MRAM PVD Equipment NC7900

  

• Interconnect PVD Equipment IC7200

  

• PVD Equipment for Semiconductor (φ300mm support) EC7800

  

• Memory Wire PVD Mass Production Equipment IC7500

  

• Metal Gate Process PVD Equipment FC7100

  

• LED PVD Equipment EC8100

  

• PVD Equipment for Electronic Component Production EC7400

  

• PVD Equipment for Small-Scale Production EC7000 Series

  

In-line

• Disk PVD Equipment ML3000 Series

  

• Advanced Packaging High Productivity PVD Equipment EL3400

  

• PVD Equipment for LED Production EL3000 Series

  

Batch/Load-lock

• PVD Equipment for R&D/Small-Scale Production EB1100

  

• PVD Equipment for R&D EB1000

  

Cluster

• MRAM Etching Equipment NC8000

  

In-line

Batch/Load-lock

Cluster

• Atomic Diffusion Bonding (ADB) Equipment BC7300

  

• Atomic Diffusion Bonding Equipment BC7000

  

In-line

Batch/Load-lock