Ultra-High Vacuum Flange

ICF flange is a metal seal flange that is the most reliable and easy to handle out of all existing ultra-high vacuum flanges. ICF flange uses a custom gasket made of oxygen-free copper.

Components

Features

  1. Elastically seals the gasket by applying the "Capturing" theory.
  2. Holds the pressure up to 10-10Pa.
  3. Leak-free within the temperature range of -196℃ to +450℃.
  4. It is a completely symmetrical flange without gender.
  5. Capable of connecting to any flange with the same diameter. Rotatable flange allows you to install in any direction.
  6. The sealing gasket is made from copper sheet (oxygen-free copper), specially treated for ultra-high vacuum.
    The flange material is stainless steel (SUS304).

Specifications

ICF Fixed Flange Table

No. Flange Type Shape A B B1 C T T1 φH n P.C.D. Applicable bolt Applicable
gasket
pack		 Applicable
pipe
1 954-9401 a 34 Blank - - 7.5 - 4.5 6 27 M4×20L 953-9210 -
2 954-9402 b 6 φ6×φ4
3 954-9403 8 φ8×φ5.6
4 954-9404 10 φ10×φ8
5 954-9405 12.8 φ12.7×φ10.7
6 954-9427 c 19.2 16 φ19.1×φ16.7
7 954-1091 M4 M4×16
8 954-7051 d 70 Blank - - 12.7 - 6.7 6 58.7 M6×35L 953-5014 -
9 954-1101 e 20 17 5.3 φ19.1×φ16.7
10 954-1102 26.5 23.5 φ25.4×φ23
11 954-1103 33 30 φ32×φ29.6
12 954-1104 39 35.5 φ38×φ35
13 954-1105 42 38.5 φ41×φ38
14 954-1191 M6 M6×22L
15 954-7052 d 114 Blank - - 17.5 - 8.4 8 92.2 M8×45L 953-5015 -
16 954-1201 e 64.5 61 9.5 φ63.5×φ60.2
17 954-1291 M8 M8×30L
18 954-7053 d 152 Blank - - 20 - 8.4 16 130.3 M8×50L 953-5016 -
19 954-1301 e 103 97 11 φ101.6×φ95.6
20 954-1391 M8 M8×40L
21 954-7054 d 203 Blank - - 22 - 8.4 20 181.1 M8×55L 953-5017 -
22 954-1401 e 155.5 148.5 12.5 φ153×φ147
23 954-1491 M8 M8×40L
24 954-7055 d 253 Blank - - 25 - 8.4 24 231.9 M8×60L 953-5048 -
25 954-1501 e 205.5 198.5 12.5 φ203×φ197
26 954-1591 M8 M8×45L

ICF Rotatable Flange Table

No. Flange Type Shape A B B1 C T T1 H n P.C.D. Applicable
pipe
1 954-9420 a 34 16 19.2 Blank 7.5 14 4.5 6 27 -
2 954-1052 b 6 φ6×φ4
3 954-1053 b 8.2 φ8×φ5.6
4 954-1051 e - 13.2 φ19.1×φ16.7
5 954-1150 d 70 Blank - - 12.7 - 6.7 6 58.7 -
6 954-1151 e 20 17 5.3 φ19.1×φ16.7
7 954-1152 e 26.5 23.5 φ25.4×φ23
8 954-1153 e 33 30 φ32×φ29.6
9 954-1154 e 39 35.5 φ38×φ35
10 954-1250 d 114 Blank - - 19 - 8.4 8 92.2 -
11 954-1251 e 64.5 61 9.5 φ63.5×φ60.2
12 954-1350 d 152 Blank - - 21 - 8.4 16 130.3 -
13 954-1351 e 103 97 11 φ101.6×φ95.6
14 954-1450 d 203 Blank - - 24 - 8.4 20 181.1 -
15 954-1451 e 155.5 148.5 12.5 φ153×φ147
16 954-1550 d 253 Blank - - 25 - 8.4 24 231.9 -
17 954-1551 e 205.5 198.5 12.5 φ203×φ197

Large Diameter ICF Fixed Flange Table

No. Flange Type Shape φA φB
(Note 2)		 θ
(Angle)		 T T1
(*3)		 φH n P.C.D Applicable
bolt/nut/washer		 Applicable
Gasket
Type
(*5)		 Applicable
pipe
Outside
diameter
×
Inside
diameter
Type Dimensions
1
(*1)		 954-1611 a 305 Blank 11°15′ 28 - 8.4 32 284 953-7801 M8×70L 953-7131 -
2
(*2)		 954-1612 b 305 250 11°15′ 28 150 8.4 32 284 953-7801 M8×70L 953-7131 φ250×φ244
3
(*3)		 954-1622 c 305 250 11°15′ 28 150 M8
(*4)		 32 284 953-7811 M8×50L 953-7131 φ250×φ244
4 954-1701 a 356 Blank 12° 28.5 - 10.5 30 325.4 953-7802 M10×70L 953-7132 -
5 954-1712 b 356 295 12° 28.5 150 10.5 30 325.4 953-7802 M10×70L 953-7132 φ295×φ289
6 954-1722 c 356 295 12° 28.5 150 M10
(*4)		 30 325.4 953-7812 M10×50L 953-7132 φ295×φ289
7 954-1801 a 406 Blank 12° 28.5 - 10.5 30 381 953-7802 M10×70L 953-7133 -
8 954-1812 b 406 350 12° 28.5 150 10.5 30 381 953-7802 M10×70L 953-7133 φ350×φ344
9 954-1822 c 406 350 12° 28.5 150 M10
(*4)		 30 381 953-7812 M10×50L 953-7133 φ350×φ344

Large Diameter ICF Rotatable Flange Table

No. Assembly
Type		 Receive flange Inside flange φA φB
(*3)		 θ
(Angle)		 T T1
(*4)		 φH n P.C.D Applicable pipe
Outside diameter
×
Inside diameter
Type Shape Type Shape
1
(*2)		 954-1661 954-1670 R 954-1681 a 305 Blank 11°15′ 28 - 8.4 32 284 -
2
(*2)		 954-1662 954-1670 R 954-1682 b 305 250 11°15′ 28 150 8.4 32 284 φ250×φ244
3 954-1751 954-1760 R 954-1771 a 356 Blank 12° 28.5 - 10.5 30 325.4 -
4 954-1752 954-1760 R 954-1782 b 356 295 12° 28.5 150 10.5 30 325.4 φ295×φ289
5 954-1851 954-1860 R 954-1871 a 406 Blank 12° 28.5 - 10.5 30 381 -
6 954-1852 954-1860 R 954-1882 b 406 350 12° 28.5 150 10.5 30 381 φ350×φ344

ICF Zero-Length Flange Adaptor Table

No. Conversion
ICF
Type		 I flange II flange φA φB T M
ICF size Applicable
gasket		 *Applicable
bolt		 ICF size Applicable
gasket		 Applicable
bolt
1 952-7010 φ70ICF 953-5014 M6×35L φ34ICF 953-9210 M4×12L 70 17 12.7 6-M4(Depth6)
2 952-7020 φ114ICF 953-5015 M8×45L φ34ICF 953-9210 M4×14L 114 17 17.5 6-M4(Depth9)
3 952-7021 φ114ICF 953-5015 M8×45L φ70ICF 953-5014 M6×22L 114 38 17.5 6-M6(Depth10)
4 952-7030 φ152ICF 953-5016 M8×50L φ34ICF 953-9210 M4×14L 152 17 20 6-M4(Depth9)
5 952-7031 φ152ICF 953-5016 M8×50L φ70ICF 953-5014 M6×22L 152 38 20 6-M6(Depth10)
6 952-7032 φ152ICF 953-5016 M8×50L φ114ICF 953-5015 M8×25L 152 65 20 8-M8(Depth10)
7 952-7040 φ203ICF 953-5017 M8×55L φ34ICF 953-9210 M4×14L 203 17 22 6-M4(Depth9)
8 952-7041 φ203ICF 953-5017 M8×55L φ70ICF 953-5014 M6×22L 203 38 22 6-M6(Depth10)
9 952-7042 φ203ICF 953-5017 M8×55L φ114ICF 953-5015 M8×25L 203 65 22 8-M8(Depth10)
10 952-7043 φ203ICF 953-5017 M8×55L φ152ICF 953-5016 M8×30L 203 103 22 16-M8(Depth10)
11 952-7050 φ253ICF 953-5048 M8×60L φ34ICF 953-9210 M4×14L 253 17 25 6-M4(Depth9)
12 952-7051 φ253ICF 953-5048 M8×60L φ70ICF 953-5014 M6×22L 253 38 25 6-M6(Depth10)
13 952-7052 φ253ICF 954-5048 M8×60L φ114ICF 953-5015 M8×25L 253 65 25 8-M8(Depth12)
14 952-7053 φ253ICF 953-5048 M8×60L φ152ICF 953-5016 M8×30L 253 103 25 16-M8(Depth12)
15 952-7054 φ253ICF 953-5048 M8×60L φ203ICF 953-5017 M8×30L 253 154 25 20-M8(Depth12)

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