Ion Pump/Noble Pump
Ion pump/noble pump is an ultra-high vacuum pump which utilizes the gas adsorption properties of the cathode material sputtered by cold cathode discharge within a magnetic field and the continuous formation of active getter film by sputtering cathode material (Ti) during collision with the cathode.
Components
Features
- Fully oil free
Clean vacuum can be obtained without contaminating the system because no organic materials, such as oil, are used. Ultra-high vacuum, extreme high vacuum - Ultra-high vacuum, extreme high vacuum
Ion pump/noble pump is best suited for creating extreme high vacuum in the range from 10-1Pa to 10-9Pa. - Unattended operation
Only electrical power is required making it convenient for night time unattended or remote operation. - Inert gas pumping (noble pump)
Improved inert gas pumping speed compared to diode ion pump. (Approximately 21% of air with argon)
Applications
- Fully oil free ultra-high vacuum and extreme vacuum pumping systems
- Electron microscopes, surface analyzers
- Particle accelerators, nuclear fusion experimental devices, space environmental testing equipment
- Vacuum retention pump for electron tubes, etc.
Specifications
20L/s Ion Pump, Noble Pump
| Pump | Name | 20L/s Ion Pump | 20L/s Nobel Pump |
|---|---|---|---|
| Type | 912-7125 | 912-7120 | |
| Pumping speed (N2 gas) | 20L/s | ||
| Operating range(Note 1) | 10-1 to 10-9Pa | 1 to 10-9Pa | |
| Ready to start pressure(Note 1) |
1.3 Pa or less | 6.7 Pa or less | |
| Capacity | 1.4L | ||
| Maximum heating temperature |
250℃ | ||
| Inlet | φ70ICF | ||
| Current input terminal | Non-replaceable | ||
| Element (replaceable) | Non-replaceable | ||
| Magnet | 912-7121(×1) included | ||
| Weight | 10.5kg | ||
30L/s Ion Pump, Noble Pump
| Pump | Name | 30L/s Ion Pump | 20L/s Nobel Pump |
|---|---|---|---|
| Type | 912-7135 | 912-7130 | |
| Pumping speed (N2 gas) | 30L/s | ||
| Operating range(Note 1) | 10-1 to 10-9Pa | 1 to 10-9Pa | |
| Ready to start pressure(Note 1) |
1.3 Pa or less | 6.7 Pa or less | |
| Capacity | 2.2L | ||
| Maximum heating temperature |
250℃ | ||
| Inlet | φ114ICF | ||
| Current input terminal | 954-7281 | ||
| Element (replaceable) | Non-replaceable | ||
| Magnet | 912-7121 (×1) included | ||
| Weight | 12.5kg | ||
60L/s Ion Pump, Noble Pump
| Pump | Name | 60L/s Ion Pump | 60L/s Nobel Pump |
|---|---|---|---|
| Type | 912-7165 | 912-7160 | |
| Pumping speed (N2 gas) | 60L/s | ||
| Operating range(Note 1) | 10-1 to 10-9Pa | 1 to 10-9Pa | |
| Ready to start pressure(Note 1) |
1.3 Pa or less | 6.7 Pa or less | |
| Capacity | 6.2L | ||
| Maximum heating temperature |
250℃ | ||
| Inlet | φ152ICF | ||
| Current input terminal | 954-7281 | ||
| Element (replaceable) | 915-7027 (1set) | 915-9527 (1set) | |
| Magnet | 912-7121 (×2) included | ||
| Weight | 25.6kg | ||
110L/s Noble Pump, 140L/s Ion Pump
| Pump | Name | 110L/s Nobel Pump | 140L/s Ion Pump |
|---|---|---|---|
| Type | 912-7020 | 912-7010 | |
| Pumping speed (N2 gas) | 110L/s | 140L/s | |
| Operating range(Note 1) | 1 to 10-9Pa | 10-1 to 10-9Pa | |
| Ready to start pressure(Note 1) |
6.7 Pa or less | 1.3 Pa or less | |
| Capacity | 18L | ||
| Maximum heating temperature |
250℃ | ||
| Inlet | φ203ICF | ||
| Current input terminal | 954-7281 | ||
| Element (replaceable) | 915-9520 (×1) | 915-9510 (×1) | |
| Magnet | 912-7001 (×1) included | ||
| Weight | 48kg | ||
220L/s Noble Pump
| Pump | Name | 220L/s Noble Pump | |
|---|---|---|---|
| Type | 912-7040 | 912-7041 | |
| Pumping speed (N2 gas) | 220L/s | ||
| Operating range(Note 1) | 5×10-1 to 10-9Pa | ||
| Ready to start pressure(Note 1) |
3.4 Pa or less | ||
| Capacity | 26L | 28L | |
| Maximum heating temperature |
250℃ | ||
| Inlet | φ203ICF | ||
| Current input terminal | 954-7281 | ||
| Element (replaceable) | 915-9510 (x2) | ||
| Magnet | 912-7002 (×1) included | 912-7001 (×2) included | |
| Weight | 85kg | 90kg | |
270L/s Ion Pump
| Pump | Name | 270L/s Ion Pump | |
|---|---|---|---|
| Type | 912-7030 | 912-7031 | |
| Pumping speed (N2 gas) | 270L/s | ||
| Operating range(Note 1) | 5×10-2 to 10-9Pa | ||
| Ready to start pressure(Note 1) |
6.5×10-1Pa or less | ||
| Capacity | 26L | 28L | |
| Maximum heating temperature |
250℃ | ||
| Inlet | φ203ICF | ||
| Current input terminal | 954-7281 | ||
| Element (replaceable) | 915-9510 (x2) | ||
| Magnet | 912-7002 (×1) included | 912-7001 (×2) included | |
| Weight | 85kg | 90kg | |
400L/s Noble Pump, 500L/s Ion Pump
| Pump | Name | 400L/s Nobel Pump | 500L/s Ion Pump |
|---|---|---|---|
| Type | 912-7060 | 912-7050 | |
| Pumping speed (N2 gas) | 400L/s | 500L/s | |
| Operating range(Note 1) | 1 to 10-9Pa | 10-1 to 10-9Pa | |
| Ready to start pressure(Note 1) |
6.7 Pa or less | 1.3 Pa or less | |
| Capacity | 38L | ||
| Maximum heating temperature |
250℃ | ||
| Inlet | φ203ICF | ||
| Current input terminal | 954-7281 | ||
| Element (replaceable) | 915-9520 (×4) | 915-9510 (×4) | |
| Magnet | 912-7002 (x2) included | ||
| Weight | 120kg | ||
800L/s Noble Pump, 1000L/s Ion Pump
| Pump | Name | 800L/s Nobel Pump | 1000L/s Ion Pump | ||
|---|---|---|---|---|---|
| Type | 912-9110 | 912-7190 | 912-9100 | 912-7195 | |
| Pumping speed (N2 gas) | 800L/s | 1000L/s | |||
| Operating range(Note 1) | 10-2 to 10-9Pa | 10-3 to 10-9Pa | |||
| Ready to start pressure(Note 1) |
1.3×10-1 Pa or less | 1.3×10-2 Pa or less | |||
| Capacity | 106L | ||||
| Maximum heating temperature |
250℃ | ||||
| Inlet | φ326CS flange | φ356ICF | φ326CS flange | φ356ICF | |
| Current input terminal | 954-7281 | ||||
| Element (replaceable) | 912-9520 (×8) | 915-9510 (×8) | |||
| Magnet | 912-7003 (×2) included | ||||
| Weight | 257kg | ||||
