POWER Series Cryo Pump
The POWER series cryo pump is a high performance cryo pump that reduces regeneration/startup time to help increase vacuum equipment productivity and utilization, provides high pumping capacity, excellent pumping performance and improved temperature stability during multi-operation.
POWER Series Cryo Pump High performance cryo pump having 8- to 12-inch intake diameter (compact)
Components
Features
- Enables safe and high-speed regeneration without heater
- POWER startup and stability (excellent startup characteristic and temperature stability)
- Low vibration
Average vibration acceleration is less than 1/10 compared to our previous product.
Applications
- Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment)
- Electronic component manufacturing equipment
- Vacuum evaporation systems
- Vacuum furnaces, space chambers
- Accelerators
- Various high vacuum equipment
Specifications
| Pump Type | P-080C | P-081C | P-081CL | P-082C | P-083C | P-100CL | P-101C | P-101CL | Remarks | |
|---|---|---|---|---|---|---|---|---|---|---|
| Diameter | 8 inch | 8 inch | 8 inch | 8 inch | 8 inch | 10 inch | 10 inch | 10 inch | ||
| Shape | Vertical | Vertical | Horizontal | Vertical | Vertical | Horizontal | Vertical | Horizontal | ||
| Pumping speed (L/S) |
Nitrogen | 1,500 | 1,500 | 1,500 | 1,500 | 1,500 | 2,400 | 2,400 | 2,400 | |
| Argon | 1,300 | 1,300 | 1,300 | 1,300 | 1,300 | 2,000 | 2,000 | 2,000 | ||
| Hydrogen | 1,000 | 2,500 | 2,200 | 1,000 | 1,000 | 3,000 | 3,800 | 3,700 | ||
| Water | 4,000 | 4,000 | 4,000 | 4,000 | 4,000 | 6,400 | 6,400 | 6,400 | ||
| Maximum pumping flow (Pa·m3/s) |
1.5 | 1.2 | 1.2 | 1.5 | 1.5 | 1.0 | 1.0 | 1.0 | ||
| Maximum gas instantaneous tolerance (Pa·m3) |
18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | ||
| Startup time (min) | 45 | 50 | 65 | 45 | 50 | 80 | 70 | 80 | *1 | |
| Regeneration (heat-up) time (min) |
30 | 30 | 30 | 30 | 35 | 40 | 35 | 45 | *1 | |
| Startup regeneration time (min) |
75+α | 80+α | 95+α | 75+α | 85+α | 120+α | 105+α | 125+α | *1 | |
| Pumping capacity (Pa·m3) |
Argon | 80,000 | 80,000 | 80,000 | 150,000 | 190,000 | 140,000 | 160,000 | 140,000 | *2 |
| Hydrogen | 1,300 | 1,800 | 1,600 | 1,300 | 1,300 | 1,300 | 2,000 | 1,800 | ||
| Ultimate temperature(K) |
15 or less | |||||||||
| Ultimate pressure(Pa) |
Approx. 10-7 | |||||||||
| Maximum heating temperature(℃) |
70 | |||||||||
| Ambient temperature range(℃) |
10 to 35 | |||||||||
| Recommended maintenance interval(h) |
Within 16,000h | |||||||||
| Weight (kg) | 22 | 22 | 22 | 23 | 24 | 25 | 24 | 25 | ||
| Number of operable units |
P-421CA | 1 | 1 | 1 | 1 | 1 | 1 | 1 | 1 | *3 |
| P-875CA | 3 | 3 | 3 | 3 | 3 | 3 | 3 | 3 | *3 | |
| Pump Type | P-120C | P-120CL | P-121C | P-121CL | P-122C | Remarks | |
|---|---|---|---|---|---|---|---|
| Diameter | 12 inch | 12 inch | 12 inch | 12 inch | 12 inch | ||
| Shape | Vertical | Horizontal | Vertical | Horizontal | Vertical | ||
| Pumping speed (L/S) | Nitrogen | 4,000 | 4,000 | 4,000 | 4,000 | 4,000 | |
| Argon | 3,200 | 3,200 | 3,200 | 3,200 | 3,200 | ||
| Hydrogen | 3,600 | 3,000 | 6,000 | 5,000 | 3,000 | ||
| Water | 9,000 | 9,000 | 9,000 | 9,000 | 9,000 | ||
| Maximum pumping flow (Pa·m3/s) | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | ||
| Maximum gas instantaneous tolerance (Pa·m3) | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | ||
| Startup time (min) | 60 | 90 | 70 | 100 | 60 | *1 | |
| Regeneration(heat-up) time(min) | 35 | 40 | 40 | 50 | 30 | *1 | |
| Startup regeneration time(min) | 95+α | 130+α | 110+α | 150+α | 90+α | *1 | |
| Pumping capacity (Pa·m3) | Argon | 260,000 | 200,000 | 260,000 | 200,000 | 400,000 | *2 |
| Hydrogen | 1,600 | 1,400 | 2,400 | 2,200 | 1,600 | ||
| Ultimate temperature(K) |
15 or less | ||||||
| Ultimate pressure(Pa) | Approx. 10-7 | ||||||
| Maximum heating temperature(℃) | 70 | ||||||
| Ambient temperature range(℃) | 10 to 35 | ||||||
| Recommended maintenance interval(h) | Within 16,000h | ||||||
| Weight (kg) | 29 | 29 | 29 | 30 | 29 | ||
| Number of operable units | P-421CA | 1 | 1 | 1 | 1 | 1 | *3 |
| P-875CA | 3 | 3 | 3 | 3 | 3 | *3 | |