Roots Type MU Series for Light Process Roots Type Dry Pump MU100N/300
World smallest, minimum energy level roots type dry pump for light process.
Components
Features
- Compact and light weight
Compact light-weight, high performance pump providing 1660L/min pumping performance with 230mm×450mm (0.1㎡) footprint - Energy saving
•MU100N power consumption at ultimate pressure: 0.7kW (46% less compared to previous type)
•Cooling water: 2L/min (43% less compared to previous type)
•Reduced nitrogen purge consumption with no nitrogen purging required for clean use. (Nitrogen purge required for Ar pumping.)
Applications
Light processes
- Sputtering
- Load locks
Specifications
| Type | MU100N | MU300 | |
|---|---|---|---|
| Maximum pumping rate (L/min) | 1,660 | 5,000 | |
| Ultimate pressure (Note1) (Pa) | 1.5 | 0.5 | |
| Maximum inlet pressure | Atmospheric pressure | ||
| Maximum pumping-port pressure | Atmospheric pressure | ||
| Intake flange | NW50 | ||
| Pumping-port flange | NW25 | ||
| Cooling water | Maximum supply pressure(MPa) | 0.5 (gauge pressure) IN-OUT difference: 0.2 or greater | |
| Flow(L/min) | 2 to 3 (Temperature: 10 to 25℃) | ||
| Connection port diameter | Rc1/4 (with self-sealed coupler) | Rc3/8 (with self-sealed coupler) | |
| Nitrogen | Supply pressure(MPa) | 0.1 to 0.7 (gauge pressure) | |
| Flow (Note2) (L/min) | 0 or 5 | 0 to 10 | |
| Connection port diameter | 1/4"pipe joint | ||
| Power supply voltage | 3 phase 200 to 220VAC 50/60Hz | ||
| Power supply capacity (kVA) | 4.0 | 7.0 | |
| Power consumption (Note3) (kW) | 0.7 | 0.9 | |
| Operating environment temperature range (℃) | 5 to 30℃ | ||
| Weight(kg) | 60 | 100 | |
| Dimensions L×W×H (mm) | 450×230×275 | 450×230×550 | |
1) Indicates value without nitrogen purge.
2) Nitrogen flow depends on application.
3) Value at ultimate pressure.