Pirani Gauge (corrosion-resistant type) M-351PG


This is a model using Ni filament to increase corrosion resistance. It supports hard process equipment such as RIE and CVD.



  1. Improved corrosion resistance
    Uses Ni filament
  2. Good repeatability and low cost
  3. From 5×10-2Pa to atmospheric pressure


  • Semiconductor and electronic device manufacturing equipment
    Dry etching equipment, plasma CVD equipment, LD-CVD equipment
  • Food and drug manufacturing equipment
    Vacuum-freeze drying, reduced-pressure distillation, sterilization equipment


Type M-351PG-SP
(Ni filament) (Setpoint equipped type)
Measurement pressure range 5×10-2 to 1×105(Pa)
Accuracy (Pa) ±50%: 5×10-2 to 1×10-1
±15%: 1×10-1 to 1×104
±50%: 1×104 to 1×105
Repeatability ±2%: 1×10-1 to 1×104Pa
Input voltage +14 to 30VDC
Power consumption 2W
Analog output 0 to 10V
Gauge identification resistance 13KΩ (between D-sub 5 and 9 pin)
Set point 2 contact output (1A 30V, DC)
Interface -
I/O connector D-sub 9 pin
Maximum cable length 200m (0.34mm2) supported*1
Operating temperature range 5 to 60℃
Storage temperature range -20 to 70℃ (not operating)
Baking temperature <+150℃ (O ring specification, gauge head only)
<+300℃ (metal seal specification, gauge head only)
Allowed overload pressure 1MPa (limited to joint shape, inert gas, absolute temperature)
Applicable Pirani Sensor Type MP-2
Flange shape NW16, NW25, 1/8NPT
Sensor material
(main component)
Pirani filament: Nickel
Sensor tube: Stainless steel
Inlet terminal insulator: Koval glass+Al2O3 coated
Conformity CE marking, RoHS, IP40


Pirani Gauge Dimensions

Parts Number

Parts Number Model Description Remarks Code
0160-08359 M-351PG-SP/N16 Pirani Gauge Nickel Filament 22665
0160-08854 M-351PG-SP/N25 Pirani Gauge Nickel Filament 22666
0161-62080 MP-2/NW16 Pirani Gauge Head Nickel Filament 22668
0161-70368 MP-2/NW25 Pirani Gauge Head Nickel Filament 22669