Pirani Gauge (corrosion-resistant type) M-351PG
This is a model using Ni filament to increase corrosion resistance. It supports hard process equipment such as RIE and CVD.
Components
Features
- Improved corrosion resistance
Uses Ni filament - Good repeatability and low cost
- Can measure from 5×10-2Pa to atmospheric pressure
Applications
- Semiconductor and electronic device manufacturing equipment
Dry etching equipment, plasma CVD equipment, LD-CVD equipment - Food and drug manufacturing equipment
Vacuum-freeze drying, reduced-pressure distillation, sterilization equipment
Specifications
| Type | M-351PG-SP (Ni filament) (Setpoint equipped type) |
|---|---|
| Measurement pressure range | 5×10-2 to 1×105(Pa) |
| Accuracy (Pa) | ±50%: 5×10-2 to 1×10-1 ±15%: 1×10-1 to 1×104 ±50%: 1×104 to 1×105 |
| Repeatability | ±2%: 1×10-1 to 1×104Pa |
| Input voltage | +14 to 30VDC |
| Power consumption | 2W |
| Analog output | 0 to 10V |
| Gauge identification resistance | 13KΩ (between D-sub 5 and 9 pin) |
| Set point | 2 contact output (1A 30V, DC) |
| Interface | - |
| I/O connector | D-sub 9 pin |
| Maximum cable length | 200m (0.34mm2) supported*1 |
| Operating temperature range | 5 to 60℃ |
| Storage temperature range | -20 to 70℃ (not operating) |
| Baking temperature | <+150℃ (O ring specification, gauge head only) <+300℃ (metal seal specification, gauge head only) |
| Allowed overload pressure | 1MPa (limited to joint shape, inert gas, absolute temperature) |
| Applicable Pirani Sensor Type | MP-2 |
| Flange shape | NW16, NW25, 1/8NPT |
| Sensor material (main component) |
Pirani filament: Nickel Sensor tube: Stainless steel Inlet terminal insulator: Koval glass+Al2O3 coated |
| Conformity | CE marking, RoHS, IP40 |
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 8B1-0010-971 | M-351PG-SP/N16 | Pirani Gauge | Nickel Filament | 22665 |
| 8B1-0011-008 | M-351PG-SP/N25 | Pirani Gauge | Nickel Filament | 22666 |
| 8B1-0015-292 | MP-2/NW16 | Pirani Gauge Head | Nickel Filament | 22668 |
| 8B1-0015-370 | MP-2/NW25 | Pirani Gauge Head | Nickel Filament | 22669 |
Download
Downloading of the instruction manual is limited to customers who have completed user registration (free of charge).
Please apply from this form.
The person in charge will inform you of the download ID and password at a later date.