Ion Gauge M-311HG
This is a transducer vacuum series ion gauge. Ion gauge (hot cathode ionization vacuum gauge) is an excellent vacuum gauge with good repeatability and linearity and wide pressure measurement range. It uses a proven miniature gauge (MG-2I) as sensor.
Components
Features
- Wide pressure measurement range
From 10-7Pa to 10Pa, capable of measuring low vacuum below the sputtering process without sacrificing the ultra-high vacuum end characteristic. - High response analog output
Excellent response with analog signal output of pressure value within 100ms to enable use in process pressure control. - Four emission current setting modes
Selectable according to application to improve filament life during use in high pressure range.
Applications
- Production use vacuum equipment pressure measurement
- Semiconductor sputtering equipment pressure measurement
- Various vacuum equipment
Options
- Display equipment supporting the series is available.
Large digital LCD for easy viewing.
Significantly improved operability.
Select between 1ch type or 3ch type according to your needs.
Specifications
| Parameter | Unit |
G-311VH-D / DL |
G-311-DP / DPL |
|---|---|---|---|
| Tube Voltage Operational Range | kV | 60 - 110 | |
| Tube Current Operational Range (Target Current) |
µm | 10 - 300 | |
| Maximum Output | W | 30 | |
| Minimum Resolution (JIMA RT RC-02B) |
µm | 4 | |
| X-ray Window Material | — | Diamond | |
| Focus-to-Object Distance (FOD) | mm | Minimum 0.29 | |
| Target Material | — | Tungsten | |
| X-ray Beam Angle | deg. | 168 (Max.), 80 (80％, Equidistance) | |
| Weight | kg | Standard Holder Type : 21 kg, Long Holder Type : 24 kg | |
| Communication Interface | — | RS-232C | |
| External Contact Control Function | — | Irradiation Interlock function (2 circuits) | Irradiation Interlock function (2 circuits) |
| Trigger input for Pulse Irradiation | |||
| Irradiation Off Timer | s | Minimum setting value: 1 s | |
| Pulse Irradiation Function | — | Minimum Pulse Width 50ms (use the trigger input for Pulse Irradiation） | |
| External Control | — | RS-232C | |
| Input Voltage (DC) | V | 24 (+1.2, -1.2) | |
| Maximum Power Consumption | W | 40 | |
| Operational Ambient Temperature | °C | 10 - 45 | |
| Storage Temperature | °C | 0 - 50 | |
| Operational and Storage Humidity | % | ≦85 (No Condensation) | |
| High Voltage Power Supply | — | Built-in | |
| Conformity | — | CE marking, RoHS | |
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 8B1-0015-826 | M-311HG-SP/N16 | Ion Gauge | With NW16 Flange | 22670 |
| 8B1-0015-827 | M-311HG-SP/N25 | Ion Gauge | With NW25 Flange | 22671 |
| 8B1-0015-828 | M-311HG-SP/C70 | Ion Gauge | With φ70ICF Flange | 22672 |
| 8B1-0015-829 | M-311HG-SP/C34 | Ion Gauge | With φ34ICF Flange | 22673 |
| 8B1-0015-830 | M-311HG-RS/N16 | Ion Gauge (RS485) | With NW16 Flange | 22674 |
| 8B1-0015-831 | M-311HG-RS/N25 | Ion Gauge (RS485) | With NW25 Flange | 22675 |
| 8B1-0015-832 | M-311HG-RS/C70 | Ion Gauge (RS485) | With φ70ICF Flange | 22676 |
| 8B1-0015-833 | M-311HG-RS/C34 | Ion Gauge (RS485) | With φ34ICF Flange | 22677 |