Ion Gauge M-311HG
This is a transducer vacuum series ion gauge. Ion gauge (hot cathode ionization vacuum gauge) is an excellent vacuum gauge with good repeatability and linearity and wide pressure measurement range. It uses a proven miniature gauge (MG-2I) as sensor.
Components
Features
- Wide pressure measurement range
From 10-7Pa to 10Pa, capable of measuring low vacuum below the sputtering process without sacrificing the ultra-high vacuum end characteristic. - High response analog output
Excellent response with analog signal output of pressure value within 100ms to enable use in process pressure control. - Four emission current setting modes
Selectable according to application to improve filament life during use in high pressure range.
Applications
- Production use vacuum equipment pressure measurement
- Semiconductor sputtering equipment pressure measurement
- Various vacuum equipment
Options
- Display equipment supporting the series is available.
Large digital LCD for easy viewing.
Significantly improved operability.
Select between 1ch type or 3ch type according to your needs.
Specifications
| Type | Ion Gauge | |
|---|---|---|
| M-311HG‐SP | M-311HG‐RS | |
| Pressure measurement range | 1×10-7 to 10Pa | |
| Input voltage | 20 to 28VDC | |
| Power consumption | 12W | |
| Analog output | 0 to 10 V | - |
| Set point | 2-point relay output | |
| Interface | - | RS485 |
| I/O connector | Dsub-9 (Male) | |
| Maximum cable length | 200m (1mm2) | |
| Operating temperature range | 5 to 50℃ | |
| Storage temperature range | -20 to 70℃ | |
| Sensor Type | Miniature B-A Gauge (MG-2I Series) | |
| Sensor material (main component) | Filament: Y2O3/Ir, Case: SUS304 | |
| Dimensions (mm) | 110×70×50 | |
| Flange shape | NW16, NW25, ICF34, ICF70 | |
| Conformity | CE marking, RoHS, IP40 | |
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 0161-78390 | M-311HG-SP/N16 | Ion Gauge | w NW16 Flange | 22670 |
| 0161-78405 | M-311HG-SP/N25 | Ion Gauge | w NW25 Flange | 22671 |
| 0161-78413 | M-311HG-SP/C70 | Ion Gauge | w φ70ICF Flange | 22672 |
| 0161-78421 | M-311HG-SP/C34 | Ion Gauge | w φ34ICF Flange | 22673 |
| 0161-78439 | M-311HG-RS/N16 | Ion Gauge (RS485) | w NW16 Flange | 22674 |
| 0161-78447 | M-311HG-RS/N25 | Ion Gauge (RS485) | w NW25 Flange | 22675 |
| 0161-78455 | M-311HG-RS/C70 | Ion Gauge (RS485) | w φ70ICF Flange | 22676 |
| 0161-78463 | M-311HG-RS/C34 | Ion Gauge (RS485) | w φ34ICF Flange | 22677 |