Crystal Gauge M-320XG
Enables a wide range of highly reliable measurement from atmospheric pressure to 1×10-1Pa.
Provides excellent repeatability and constant measurement near atmospheric pressure through the use of phenomenon where crystal oscillator's resonant impedance changes according to pressure.
It can be used as a chamber atmospheric pressure vent detection pressure switch or for process pressure measurement.
Components
Features
- Wide measurement range
Enables measurement with excellent repeatability from atmospheric pressure to 1×10-1Pa. - High stability
Crystal gauge is a vacuum gauge with no source of heat (filament).
Enables safe handling without affecting process gas. - Compact and ultra-light weight
The controller fits in the palm of your hand weighing only 200g.
Applications
- Roughing pump pressure measurement of various vacuum equipment
- Various process pressure measurement
- Detection pressure switch for chamber vent, etc.
- Other pressure measurements from atmospheric pressure to 10-2Pa
Specifications
| Type | M-320XG | |
|---|---|---|
| Measurement ball | XG-1 Crystal Gauge Head (exclusive for crystal gauge) | |
| Pressure monitor range | 1×10-2Pa to atmospheric | |
| Measurement pressure range | 1×10-1Pa to atmospheric | |
| Gas type selections | N2, Ar, H2, Air | |
| Analog output (pressure signal) |
0 to 10VDC: Set output format of following items with digit switch 1. Log output 2. Multiple output 3. Linear output Full scale pressure range selectable (1×101, 1×102, 1×103, 1×104, 1×105Pa) |
|
| Remote I/O | INPUT | 1. Set gas type switch with 2-bit signal 2. Zero adjustment 3. ATM setting |
| OUTPUT | 2 set point output | |
| Set point | 2 points (photocoupler output, fixed hysteresis) Set with digit switch (SP1, SP2 mantissa, exponent) |
|
| Operating environment | 5℃ to 50℃ (including controller) Gauge head only withstand temperature 150℃ MAX |
|
| Zero adjustment | PUSH switch or software adjustment by remote I/O | |
| Full scale adjustment | Adjustment by trimmer | |
| I/O connector | Dsub 15P | |
| Display | LED ×3 (PWR/ALM (Green/Red), SP1-Status (Green), SP2-Status (Green)) | |
| Power requirements | 22 to 33VDC, (maximum power consumption 2W) | |
| Dimensions (mm) | 72.5H×102W×44.5D (excluding gauge head) | |
| Weight | 200g (excluding gauge head) | |
| Sensor attaching flange | NW16, NW25, φ34ICF, φ70ICF | |
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 8B1-0010-414 | M-320XG/N16 | A-NET Crystal Gauge | Controller + Crystal Gauge (w NW16) | 21561 |
| 8B1-0010-415 | M-320XG/N25 | A-NET Crystal Gauge | Controller + Crystal Gauge (w NW25) | 21562 |
| 8B1-0013-417 | M-320XG/C34 | A-NET Crystal Gauge | Controller + Crystal Gauge (w PY34ICF) | 21580 |
| 8B1-0010-418 | M-320XG/C70 | A-NET Crystal Gauge | Controller + Crystal Gauge (w PY70ICF) | 21581 |
| 8B1-0010-416 | M-320XG/VG70 | A-NET Crystal Gauge | Controller + Crystal Gauge (w PY70VG) | 21582 |
| 8B1-0013-956 | XG-1/NW16 | Crystal Gauge Head with NW16 | 21575 | |
| 8B1-0013-957 | XG-1/NW25 | Crystal Gauge Head with NW25 | 21576 | |
| 8B1-0012-601 | XG-1/ICF34 | Crystal Gauge Head with PY34ICF | 21577 | |
| 8B1-0012-602 | XG-1/ICF70 | Crystal Gauge Head with PY70ICF | 21578 | |
| 8B1-0013-958 | XG-1/VG70 | Crystal Gauge Head with PY70VG | 21579 | |
| 8B1-0018-906 | 601320-005 | Cable（5ｍ） | 22784 | |
| 8B1-0018-907 | 601320-010 | Cable（10ｍ） | 22785 |