Crystal Gauge M-320XG
Enables a wide range of highly reliable measurement from atmospheric pressure to 1×10-1Pa.
Provides excellent repeatability and constant measurement near atmospheric pressure through the use of phenomenon where crystal oscillator's resonant impedance changes according to pressure.
It can be used as a chamber atmospheric pressure vent detection pressure switch or for process pressure measurement.
Components
Features
- Wide measurement range
Enables measurement with excellent repeatability from atmospheric pressure to 1×10-1Pa. - High stability
Crystal gauge is a vacuum gauge with no source of heat (filament).
Enables safe handling without affecting process gas. - Compact and ultra-light weight
The controller fits in the palm of your hand weighing only 200g.
Applications
- Roughing pump pressure measurement of various vacuum equipment
- Various process pressure measurement
- Detection pressure switch for chamber vent, etc.
- Other pressure measurements from atmospheric pressure to 10-2Pa
Specifications
| Type | M-320XG | |
|---|---|---|
| Measurement ball | XG-1 Crystal Gauge Head (exclusive for crystal gauge) | |
| Pressure monitor range | 1×10-2Pa to atmospheric | |
| Measurement pressure range | 1×10-1Pa to atmospheric | |
| Gas type selections | N2, Ar, H2, Air | |
| Analog output (pressure signal) |
0 to 10VDC: Set output format of following items with digit switch 1. Log output 2. Multiple output 3. Linear output Full scale pressure range selectable (1×101, 1×102, 1×103, 1×104, 1×105Pa) |
|
| Remote I/O | INPUT | 1. Set gas type switch with 2-bit signal 2. Zero adjustment 3. ATM setting |
| OUTPUT | 2 set point output | |
| Set point | 2 points (photocoupler output, fixed hysteresis) Set with digit switch (SP1, SP2 mantissa, exponent) |
|
| Operating environment | 5℃ to 50℃ (including controller) Gauge head only withstand temperature 150℃ MAX |
|
| Zero adjustment | PUSH switch or software adjustment by remote I/O | |
| Full scale adjustment | Adjustment by trimmer | |
| I/O connector | Dsub 15P | |
| Display | LED ×3 (PWR/ALM (Green/Red), SP1-Status (Green), SP2-Status (Green)) | |
| Power requirements | 22 to 33VDC, (maximum power consumption 2W) | |
| Dimensions (mm) | 72.5H×102W×44.5D (excluding gauge head) | |
| Weight | 200g (excluding gauge head) | |
| Sensor attaching flange | NW16, NW25, φ34ICF, φ70ICF | |
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 89-2282 | M-320XG | A-NET Crystal Gauge Controller | Only Controller | 21560 |
| 89-4020 | M-320XG/N16 | A-NET Crystal Gauge | Controller + Crystal Gauge (w NW16) | 21561 |
| 89-4021 | M-320XG/N25 | A-NET Crystal Gauge | Controller + Crystal Gauge (w NW25) | 21562 |
| 0160-01365 | M-320XG/C34 | A-NET Crystal Gauge | Controller + Crystal Gauge (w PY34ICF) | 21580 |
| 0160-01373 | M-320XG/C70 | A-NET Crystal Gauge | Controller + Crystal Gauge (w PY70ICF) | 21581 |
| 0160-01357,M | M-320XG/VG70 | A-NET Crystal Gauge | Controller + Crystal Gauge (w PY70VG) | 21582 |
| H21-03280 | XG-1/NW16 | Crystal Gauge Head with NW16 | 21575 | |
| H21-03281 | XG-1/NW25 | Crystal Gauge Head with NW25 | 21576 | |
| 0161-17920 | XG-1/ICF34 | Crystal Gauge Head with PY34ICF | 21577 | |
| 0161-17938 | XG-1/ICF70 | Crystal Gauge Head with PY70ICF | 21578 | |
| 0161-44888 | XG-1/VG70 | Crystal Gauge Head with PY70VG | 21579 | |
| 89-2314 | M-390 | A-NET Display Unit | for M-320XG | 21563 |
| H21-03614 | M-391 | A-NET Display Unit | w/o Cable | 21583 |
| 89-2316 | 390-05CR | A-NET Cable for Display Unit (for Crystal Gauge 5M) | 21565 | |
| 0161-37475 | 390-03BA | A-NET Cable for Display Unit (for Ion Gauge 3M) | 21567 | |
| 0161-37491 | 390-10BA | A-NET Cable for Display Unit (for Ion Gauge 10M) | 21568 | |
| 0161-37506 | 390-15BA | A-NET Cable for Display Unit (for Ion Gauge 15M) | 21569 | |
| 0161-37514 | 390-20BA | A-NET Cable for Display Unit (for Ion Gauge 20M) | 21570 | |
| 0161-37409 | 390-03CR | A-NET Cable for Display Unit (for Crystal Gauge 3M) | 21571 | |
| 0161-37425 | 390-10CR | A-NET Cable for Display Unit (for Crystal Gauge 10M) | 21572 | |
| 0161-37433 | 390-15CR | A-NET Cable for Display Unit (for Crystal Gauge 15M) | 21573 | |
| 0161-37441 | 390-20CR | A-NET Cable for Display Unit (for Crystal Gauge 20M) | 21574 |