Crystal Gauge M-320XG

CE RoHS

Enables a wide range of highly reliable measurement from atmospheric pressure to 1×10-1Pa.

Provides excellent repeatability and constant measurement near atmospheric pressure through the use of phenomenon where crystal oscillator's resonant impedance changes according to pressure.

It can be used as a chamber atmospheric pressure vent detection pressure switch or for process pressure measurement.

Components

Features

  1. Wide measurement range
    Enables measurement with excellent repeatability from atmospheric pressure to 1×10-1Pa.
  2. High stability
    Crystal gauge is a vacuum gauge with no source of heat (filament).
    Enables safe handling without affecting process gas.
  3. Compact and ultra-light weight
    The controller fits in the palm of your hand weighing only 200g.

Applications

  • Roughing pump pressure measurement of various vacuum equipment
  • Various process pressure measurement
  • Detection pressure switch for chamber vent, etc.
  • Other pressure measurements from atmospheric pressure to 10-2Pa

Specifications

Type M-320XG
Measurement ball XG-1 Crystal Gauge Head (exclusive for crystal gauge)
Pressure monitor range 1×10-2Pa to atmospheric
Measurement pressure range 1×10-1Pa to atmospheric
Gas type selections N2, Ar, H2, Air
Analog output
(pressure signal)
0 to 10VDC: Set output format of following items with digit switch
1. Log output
2. Multiple output
3. Linear output Full scale pressure range selectable (1×101, 1×102, 1×103, 1×104, 1×105Pa)
Remote I/O INPUT 1. Set gas type switch with 2-bit signal
2. Zero adjustment
3. ATM setting
OUTPUT 2 set point output
Set point 2 points (photocoupler output, fixed hysteresis)
Set with digit switch (SP1, SP2 mantissa, exponent)
Operating environment 5℃ to 50℃ (including controller)
Gauge head only withstand temperature 150℃ MAX
Zero adjustment PUSH switch or software adjustment by remote I/O
Full scale adjustment Adjustment by trimmer
I/O connector Dsub 15P
Display LED ×3 (PWR/ALM (Green/Red), SP1-Status (Green), SP2-Status (Green))
Power requirements 22 to 33VDC, (maximum power consumption 2W)
Dimensions (mm) 72.5H×102W×44.5D (excluding gauge head)
Weight 200g (excluding gauge head)
Sensor attaching flange NW16, NW25, φ34ICF, φ70ICF

Dimensions

Dimensions

Parts Number

Parts Number Model Description Remarks Code
8B1-0010-414 M-320XG/N16 A-NET Crystal Gauge Controller + Crystal Gauge (w NW16) 21561
8B1-0010-415 M-320XG/N25 A-NET Crystal Gauge Controller + Crystal Gauge (w NW25) 21562
8B1-0013-417 M-320XG/C34 A-NET Crystal Gauge Controller + Crystal Gauge (w PY34ICF) 21580
8B1-0010-418 M-320XG/C70 A-NET Crystal Gauge Controller + Crystal Gauge (w PY70ICF) 21581
8B1-0010-416 M-320XG/VG70 A-NET Crystal Gauge Controller + Crystal Gauge (w PY70VG) 21582
8B1-0013-936 XG-1/NW16 Crystal Gauge Head with NW16   21575
8B1-0013-937 XG-1/NW25 Crystal Gauge Head with NW25   21576
8B1-0012-601 XG-1/ICF34 Crystal Gauge Head with PY34ICF   21577
8B1-0012-602 XG-1/ICF70 Crystal Gauge Head with PY70ICF   21578
8B1-0013-958 XG-1/VG70 Crystal Gauge Head with PY70VG   21579
8B1-0018-906 601320-005 Cable(5m)   22784
8B1-0018-907 601320-010 Cable(10m)   22785

Download

  • Catalog
  • Instruction manual
  • CAD