Vacuum Gauge ball
Shultz Gauge LG-11S
This is an ionization vacuum gauge ball for pressure measurement between 100Pa and 10-2Pa.
LG-11S uses thoria coated iridium filament to provide low operating temperature and extended product life. The connection with the vacuum equipment uses a φ15 adapter or is glass sealed to a glass adapter with φ70 ICF.
B-A Gauge UGD-1S
This is a sealed glass tube type B-A ionization vacuum gauge measurement ball for pressure measurement in the range under 10-2Pa.
UGD-1S is a Kovar glass sealed B-A gauge. The grid is made of tungsten and degassing is performed by electrical heating. Therefore, pressure can be measured even during degassing.
Wide Range B-A Gauge BRG-1B
This is a B-A gauge with the high-pressure end measurement range expanded. Degassing is performed by grid electrical heating similar to UGD-1S. A thoria coated iridium filter is used to enable high pressure measurement.
The connection with the vacuum equipment uses a φ15 adapter or is glass sealed to a glass adapter with φ70 ICF.
Nude Ion Gauge NIG-2F/NIG-2TF
This gauge directly mounts a B-A type electrode on a flange. This is directly attached to the equipment making it suitable for ultra-high vacuum measurement without error due to feed through. Platinum-clad molybdenum wire is used for grid to minimize error due to gas contamination.
NIG-2F uses tungsten filament. In addition, NIG-2TF uses yttria coated filament which lowers the operating temperature, suppresses degassing, and improves ultra-high vacuum measurement.
Pirani Gauge PG-150
This gauge can be used from atmospheric pressure and is installed with φ15 adapter. A Pirani gauge that can be baked at standard heatproof temperature of 80℃ is also available (200℃ maximum heating temperature with connectors removed)
Thermocouple Gauge TG-550C
This gauge can be used from atmospheric pressure and is installed with φ15 adapter. (150℃ maximum heating temperature with connectors removed)
Components
Specifications
Shultz Gauge LG-11S/B-A Gauge UGD-1S/Wide Range B-A Gauge BRG-1B
| Type | LG-11S | UGD-1S | BRG-1B | |
|---|---|---|---|---|
| Gauge Type | Shultz Gauge | B-A Gauge | Wide Range B-A Gauge | |
| Shape | Glass tube | |||
| Connection with measured vacuum chamber |
φ15 gauge port (O ring) | |||
| Recommended measurement range |
10-2 to 100 Pa | 10-6 to 0.1 Pa | 10-6 to 10 Pa | |
| Standard sensitivity |
0.0038Pa-1with respect to air | 0.075Pa-1 with respect to N2 | ||
| X-ray limit | <10-4Pa | Approx. 1.3×10-8Pa | ||
| Baking temperature |
400℃ (150℃ or less with O ring seal) |
|||
| Material | Filament | Thoria-coated iridium (×1) | Tungsten (×2) | Thoria-coated iridium (×1) |
| Body | Kovar glass (vacuum sealed) | Tungsten glass (open) | ||
| Supported vacuum gauge power supply |
NI-10D* | M-722HG·NI-10D* | M-823HG | |
| Applications | High pressure (100Pa to 102Pa) measurement gauge, sputter, etc. |
General vacuum use | B-A gauge, sputter etc. measurable up to high pressure (10Pa) | |
Nude Ion Gauge NIG-2F/NIG-2TF
| Type | NIG-2F 954-7902 |
NIG-2TF 954-7903 |
|---|---|---|
| Gauge Type | Nude Type B-A | |
| Shape | Nude Type | |
| Connection with measured vacuum chamber |
φ70ICF | |
| Recommended measurement range |
10-9 to 10-2Pa | |
| Standard sensitivity | 0.19Pa-1 with respect to N2 | |
| X-ray limit | Approx. 2.7×10-9Pa | |
| Baking temperature | 400℃ | |
| Filament | Filament material: Tungsten (×2) | Filament material: Yttria-coated iridium (×2) |
| Supported vacuum gauge power supply |
M-923HG·NI-10D* | |
| Applications | Up to 10-9Pa | |
| Ultra-high vacuum equipment (for bakable equipment) | ||
Pirani Gauge PG-150/Thermocouple Gauge TG-550C
| Type | PG-150 | |
|---|---|---|
| Gauge Type | Pirani Gauge | |
| Shape | Metal vessel | |
| Connection with measured vacuum chamber |
φ15 gauge port (O ring) | |
| Measurement range | 10-1 to 133Pa | |
| Material | Body | Stainless steel (SUS-304) |
| Supported vacuum gauge power supply |
MPG-011 MPG-012 | |
| Applications | Measurement during roughing pump | |
| Type | TG-550C | |
|---|---|---|
| Gauge Type | Thermocouple Gauge | |
| Shape | Metal vessel | |
| Connection with measured vacuum chamber |
φ15 gauge port (O ring) | |
| Measurement range | 10-1 to 200Pa | |
| Material | Body | Stainless steel (SUS-304) |
| Supported vacuum gauge power supply |
M-012DM M-722HG/822HG/833HG/922HG |
|
| Applications | Measurement during roughing pump | |
Dimensions
Shultz Gauge LG-11S/B-A Gauge UGD-1S/Wide Range B-A Gauge BRG-1B
Nude Ion Gauge NIG-2F/NIG-2TF
Pirani Gauge PG-150/Thermocouple Gauge TG-550C
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 793-0467 | LG-11S | B-A Gauge Head | Socket Type | 21100 |
| 783-5285 | UGD-1S | B-A Gauge Head | Socket Type | 21121 |
| VMT-9304 | 952-7850 | GD-1S Vertical Type B-A Gauge Head | w φ70 ICF | 21130 |
| VMT-9305 | 952-7851 | UGD-1S Wide Type B-A Gauge Head | w φ70 ICF | 21131 |
| 0161-35017 | UGD-1S Open Type (80MM Cut) | 21134 | ||
| P25-05688 | BRG-1B | Wide Range B-A Gauge Head | 21225 | |
| P25-02463 | 952-7860 | BRG-1 Vertical Type Wide Range B-A Gauge Head | φ70ICF with Glass Adapter | 21133 |
| P21-02260 | 952-7861 | BRG-1 Wide Type Wide Range B-A Gauge Head | φ70ICF with Glass Adapter | 21132 |
| 783-2411 | 952-7902 | NIG-2F Nude Ion Gauge Head | Canon Plug Type | 21120 |
| A23-04054 | NIG-2TF | Nude Ion Gauge | Yttria Coat Filament for NIG-2F | 21119 |
| A26-07217 | Yttria Coat Filament Kit | for NIG-2TF | 21142 | |
| P21-01959 | 954-7904 | NIG-2F Nude Ion Gauge Head (Flangeless) | 21118 | |
| 794-0609 | 954-7905 | Filament Kit for Nude Ion Gauge | for NIG-2F | 21140 |
| 803-0072 | PG-150 | Pirani Gauge Head | Main Body made of SUS | 21040 |
| P21-01422 | PG-150/ICF34 | Pirani Gauge Head (w φ34ICF) | PG-150 with φ34ICF | 21042 |
| P21-03056 | PG-150/ICF70 | Pirani Gauge Head (w φ70ICF) | PG-150 with φ70ICF | 21041 |
| 0161-68109 | TG-550C | Thermo-Couple Gauge Head | 21015 | |
| 0161-68117 | TG-550B | Thermo-Couple Gauge Head | 21025 | |
| 0160-07905 | TG-550/ICF34 | Thermo-Couple Gauge Head (w φ34ICF) | TG-550 with φ34ICF | 21003 |
| 0160-07913 | TG-550/ICF70 | Thermo-Couple Gauge Head (w φ70ICF) | TG-550 with φ70ICF | 21002 |