Sensor Head
B-A Gauge UGD-1S
This is a sealed glass tube type B-A ionization vacuum gauge measurement ball for pressure measurement in the range under 10-2Pa.
UGD-1S is a Kovar glass sealed B-A gauge. The grid is made of tungsten and degassing is performed by electrical heating. Therefore, pressure can be measured even during degassing.
Wide Range B-A Gauge BRG-1B
This is a B-A gauge with the high-pressure end measurement range expanded. Degassing is performed by grid electrical heating similar to UGD-1S. A thoria coated iridium filter is used to enable high pressure measurement.
The connection with the vacuum equipment uses a φ15 adapter or is glass sealed to a glass adapter with φ70 ICF.
Nude Ion Gauge NIG-2F/NIG-2TF
This gauge directly mounts a B-A type electrode on a flange. This is directly attached to the equipment making it suitable for ultra-high vacuum measurement without error due to feed through. Platinum-clad molybdenum wire is used for grid to minimize error due to gas contamination.
NIG-2F uses tungsten filament. In addition, NIG-2TF uses yttria coated filament which lowers the operating temperature, suppresses degassing, and improves ultra-high vacuum measurement.
Thermocouple Gauge TG-550C
This gauge can be used from atmospheric pressure and is installed with φ15 adapter. (150℃ maximum heating temperature with connectors removed)
Components
Specifications
B-A Gauge UGD-1S/Wide Range B-A Gauge BRG-1B
| Type | UGD-1S | BRG-1B | |
|---|---|---|---|
| Gauge Type | B-A Gauge | Wide Range B-A Gauge | |
| Shape | Glass tube | ||
| Connection with measured vacuum chamber |
φ15 gauge port (O ring) | ||
| Recommended measurement range |
10-6 to 0.1 Pa | 10-6 to 10 Pa | |
| Standard sensitivity |
0.075Pa-1 with respect to N2 | ||
| X-ray limit | Approx. 1.3×10-8Pa | ||
| Baking temperature |
400℃ (150℃ or less with O ring seal) |
||
| Material | Filament | Tungsten (×2) | Thoria-coated iridium (×1) |
| Body | Kovar glass (vacuum sealed) | Tungsten glass (open) | |
| Supported vacuum gauge power supply |
M-722HG·NI-10D* | M-823HG | |
| Applications | General vacuum use | B-A gauge, sputter etc. measurable up to high pressure (10Pa) | |
Nude Ion Gauge NIG-2F/NIG-2TF
| Type | NIG-2F 954-7902 |
NIG-2TF 954-7903 |
|---|---|---|
| Gauge Type | Nude Type B-A | |
| Shape | Nude Type | |
| Connection with measured vacuum chamber |
φ70ICF | |
| Recommended measurement range |
10-9 to 10-2Pa | |
| Standard sensitivity | 0.19Pa-1 with respect to N2 | |
| X-ray limit | Approx. 2.7×10-9Pa | |
| Baking temperature | 400℃ | |
| Filament | Filament material: Tungsten (×2) | Filament material: Yttria-coated iridium (×2) |
| Supported vacuum gauge power supply |
M-923HG·NI-10D* | |
| Applications | Up to 10-9Pa | |
| Ultra-high vacuum equipment (for bakable equipment) | ||
Thermocouple Gauge TG-550C
| Type | TG-550C | |
|---|---|---|
| Gauge Type | Thermocouple Gauge | |
| Shape | Metal vessel | |
| Connection with measured vacuum chamber |
φ15 gauge port (O ring) | |
| Measurement range | 10-1 to 200Pa | |
| Material | Body | Stainless steel (SUS-304) |
| Supported vacuum gauge power supply |
M-722HG/822HG/833HG/922HG | |
| Applications | Measurement during roughing pump | |
Dimensions
B-A Gauge UGD-1S/Wide Range B-A Gauge BRG-1B
Nude Ion Gauge NIG-2F/NIG-2TF
Thermocouple Gauge TG-550C
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 8G1-0528-648 | 954-7902 | NIG-2F Nude Ion Gauge Head | Canon Plug Type | 21120 |
| 8G1-0500-823 | NIG-2TF | Nude Ion Gauge | Yttria Coat Filament for NIG-2F | 21119 |
| 8G1-0501-490 | BRG-1B | Wide Range B-A Gauge Head | Canon Plug Type | 21225 |
| 8G1-0528-644 | UGD-1S | B-A Gauge Head | Socket Type | 21121 |
| 8G1-0550-155 | 954-7905 | Filament Kit for Node Ion Gauge | for NIG-2F | 21140 |
| 8G1-0498-142 | 954-7906 | Yttria Coat Filament Kit | for NIG-2TF | 21142 |