Capacitance Diaphragm Gauge M-342DG
The capacitance gauge M-342DG is a diaphragm gauge that enables accurate, stable pressure measurement with minimum zero adjustment.
This is achieved using a small silicon MEMS chip as the pressure sensor unit to minimize the influence from the outside environment such as changes in temperature, vibrations, and atmospheric pressure.
Components
Features
- High precision, stable pressure measurement
・Excellent zero-point stability.
・Has low temperature dependence providing excellent stability without the need of a temperature adjustment mechanism.
adjustment mechanism.
・Excellent anti-vibration noise performance. - Compact and low power consumption
・200g, W46mm × H49mm × L70mm compact, lightweight.*1
・Power consumption 0.5W.
*1: Size and weight of the coupling NW16 specifications
Applications
Supports a wide range of general industry applications such as medical and food in addition to semiconductor manufacturing equipment, panel display manufacturing equipment, and other vacuum equipment.*2
*2:Not suitable for applications where corrosive gas is used.
Please consult us for details.
Specifications
| Type | M-342DG | ||||
|---|---|---|---|---|---|
| -1D | -1N | -11 | -12 | -13 | |
| Full scale pressure (Pa) | 13.33 | 133.3 | 1.333k | 13.33k | 133.3k |
| (Torr) | 0.1 | 1 | 10 | 100 | 1000 |
| Accuracy (% of reading) |
0.20 (at 23℃) |
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| Zero temperature drift coefficient (% of F.S./℃) |
0.01 | 0.005 | 0.002 | ||
| Span temperature drift coefficient (% of reading/℃) |
0.01 | 0.005 | |||
| Resolution (％ of Full-scale) | 0.01 | 0.005 | |||
| Lowest Reading (％ of Full-scale) | 0.01 | ||||
| Lowest Suggested Pressure for Reading (％ of Full-scale) |
0.05 | ||||
| Lowest Suggested Pressure for Control (％ of Full-scale) |
0.5 | ||||
| Response time (msec) | 100 | 30 | |||
| pressure limit (Pa) | 200 kPa (absolute pressure) However, 130 kPa (absolute pressure) for M-342DG-1D (for NW16 & NW25, inner area must not be at positive pressure) |
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| Input voltage (VDC) |
+13.5 - 26.4 |
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| Power consumption (W) | 0.5 or less | ||||
| Signal output (VDC) | 0 to 10 | ||||
| Operating temperature (℃) | 0 to 50 | ||||
| Storage temperature (℃) |
-20 to 70 (not operating) |
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|
Maximum cable length (m) |
100 (0.3㎟) |
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| Zero points adjustment methods |
push switch, remote input |
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| Connector type |
D-sub 9 pin male (mating screw: #4-40 inch) |
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| Materials exposed to vacuum |
Si, Glass, SUS304, sus316, Fluorine Rubber |
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| Flange shape |
NW16, NW25, 8-VCR, φ70ICF |
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| Conformity | CE marking, RoHS, IP40 | ||||
| Security Export Control Regulation | Not applicable | ||||
| Display |
M-601GC (1ch), M-603GC(3c) |
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Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 0160-12049 | M-341DG-1D-N16 | Capacitance Gauge (13.3Pa) | Coupling: NW16 | 22735 |
| 0160-12057 | M-341DG-1D-N25 | Coupling: NW25 | 22736 | |
| 0160-12065 | M-341DG-1D-C70 | Coupling: φ70ICF | 22737 | |
| 0160-12073 | M-341DG-1D-VCR | Coupling: 8-VCR female | 22738 | |
| 0160-11645 | M-341DG-1N-N16 | Capacitance Gauge (133Pa) | Coupling: NW16 | 22710 |
| 0160-11653 | M-341DG-1N-N25 | Coupling: NW25 | 22711 | |
| 0160-11661 | M-342DG-1N-C70 | Coupling: φ70ICF | 22712 | |
| 0160-11679 | M-342DG-1N-VCR | Coupling: 8-VCR female | 22713 | |
| 0160-11459 | M-342DG-11-N16 | Capacitance Gauge (1.33kPa) | Coupling: NW16 | 22715 |
| 0160-11467 | M-342DG-11-N25 | Coupling: NW25 | 22716 | |
| 0160-11475 | M-342DG-11-C70 | Coupling: φ70ICF | 22717 | |
| 0160-11483 | M-342DG-11-VC8 | Coupling: 8-VCR female | 22718 | |
| 0160-11140 | M-342DG-12-N16 | Capacitance Gauge (13.3kPa) | Coupling: NW16 | 22720 |
| 0160-11158 | M-342DG-12-N25 | Coupling: NW25 | 22721 | |
| 0160-11077 | M-342DG-12-C70 | Coupling: φ70ICF | 22722 | |
| 0160-11166 | M-342DG-12-VC8 | Coupling: 8-VCR female | 22723 | |
| 0160-11093 | M-342DG-13-N16 | Capacitance Gauge (133kPa) | Coupling: NW16 | 22725 |
| 0160-11108 | M-342DG-13-N25 | Coupling: NW25 | 22726 | |
| 0160-11116 | M-342DG-13-C70 | Coupling: φ70ICF | 22727 | |
| 0160-11124 | M-342DG-13-VC8 | Coupling: 8-VCR female | 22728 |