Cold Cathode Pirani Gauge M-361CP


M-361CP is a combination gauge combining pirani gauge measuring atmospheric pressure to medium vacuum and cold cathode gauge measuring high vacuum to ultra-high vacuum.
Wide range measurement is realized by just one gauge.
2in1: Contributing to system cost reduction.



  1. Excellent measurement stability
    Reducing switching fault of pirani and cold cathode,measurement stop due to undischarge and fluctuation of pressure indication value.
  2. Excellent atmospheric pressure detection
    Good measurement around the atmospheric pressure area by pirani gauge.
    Responsiveness is equal to diaphragm gauge.
  3. Simple maintenance
    Only maintenance kit exchange for a part of the cold cathode gauge.

*The ignition of CC gauge may be delayed significantly under conditions of high partial pressure of active gas such as H2 and O2, or large volume use of these gases. Please contact us when using the gauge under conditions of these gases.


Widely applicable for vacuum measurements from atmospheric pressure to ultra-high vacuum

Electronics and Optics: vacuum evaporation, coating, electron beam mask writing, sputtering, ion implantation, MBE
Analysis: SEM, SIMS, AES, XPS, and other analysis methods using any vacuum processes
Industrial: anneal, dissolution, soldering, reflow, curing, electron beam welding, metallurgy, molecular distillation, gas filling
High Energy Physics: accelerator, cyclotron


Type Cold Cathode Pirani Gauge
Type with Set Point
RS485 Type
Pressure measurement range 1×10-7 to 1×105(Pa)
Input voltage +15 to 30VDC
Power consumption 2.4W
Analog output 0 to 10V -
Set point 2 contact output (DC30V, 1A)
Interface - RS485
I/O connector D-sub 9 pin (available with conversion connector)
Maximum cable length 300m (1mm2)*1
Operating temperature range 5 to 55℃
Storage temperature range -20 to 70℃ (not operating)
Sensor Type CP2
Sensor material (main component) Filament: W, Electrode: Mo, Insulator: Al2O2, Case: SUS304
Dimensions (mm) 50(W)×50(D)×110(L) (NW25)
Flange shape NW25, NW40, φ70ICF
Conformity CE marking, RoHS, IP40

*1 The maximum length of the gauge cable is 100m when connecting an M-601/603GC display unit.


Cold Cathode Pirani Gauge M-361CP Dimensions

Parts Number

Parts Number Model Description Remarks Code
0160-12463M M-361CP-SP/N25 Cold Cathode Pirani Gauge w NW25 Flange 22800
0160-12471M M-361CP-SP/N40 Cold Cathode Pirani Gauge w NW40 Flange 22801
0160-12489M M-361CP-SP/C70 Cold Cathode Pirani Gauge w φ70ICF Flange 22802
0160-12497M M-361CP-SP/N25 Cold Cathode Pirani Gauge (RS485) w NW25 Flange 22803
0160-12502M M-361CP-SP/N40 Cold Cathode Pirani Gauge (RS485) w NW40 Flange 22804
0160-12510M M-361CP-SP/C70 Cold Cathode Pirani Gauge (RS485) w φ70ICF Flange 22805
0162-24379M - M-361CP/370CG Maintenance kit Pole piece, Mesh 22790