Cold Cathode Gauge M-370CG
It is a robust cold cathode gauge that does not use hot filament.
Stable pressure measurement from high vacuum to ultra-high vacuum is realized.
Components
Features
- Excellent measurement stability
Reducing measurement stop due to undischarge and fluctuation of pressure indication value. - Good startability under high vacuum
Eliminating undischarge and discharge delay. - Simple maintenance
Only maintenance kit exchange.
*The ignition of CC gauge may be delayed significantly under conditions of high partial pressure of active gas such as H2 and O2, or large volume use of these gases. Please contact us when using the gauge under conditions of these gases.
Applications
Widely applicable for vacuum measurements from 1Pa to ultra-high vacuum
･vacuum evaporation, sputtering, ion implantation, MBE
･SEM, SIMS, AES, XPS, surface/gas analysis, mass spectrometry
･anneal, dissolution, soldering, reflow, electron beam welding
･accelerator, cyclotron
Specifications
| Type | Cold Cathode Gauge | |
|---|---|---|
| M-370CG-SP Type with Set Point |
M-370CG-RS RS485 Type |
|
| Pressure measurement range | 1×10-7 to 1×100(Pa) | |
| Input voltage | +15 to 30VDC | |
| Power consumption | 2.4W | |
| Analog output | 0 to 10V | - |
| Set point | 2 contact output (DC30V, 1A) | |
| Interface | - | RS485 |
| I/O connector | D-sub 9 pin | |
| Maximum cable length | 300m (1mm2)*1 | |
| Operating temperature range | 5 to 55℃ | |
| Storage temperature range | -20 to 70℃ (not operating) | |
| Sensor Type | CC1 | |
| Sensor material (main component) | Electrode: Mo, Insulator: Al2O2, Case: SUS304 | |
| Dimensions (mm) | 50(W)×50(D)×110(L) (NW25) | |
| Flange shape | NW25, NW40, φ70ICF | |
| Conformity | CE marking, RoHS, IP40 | |
*1 The maximum length of the gauge cable is 100m when connecting an M-601/603GC display unit.
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 0160-12811 | M-370CG-SP/N25 | Cold Cathode Gauge | With NW25 Flange | 22806 |
| 0160-12829 | M-370CG-SP/N40 | Cold Cathode Gauge | With NW40 Flange | 22807 |
| 0160-12837 | M-370CG-SP/C70 | Cold Cathode Gauge | With φ70ICF Flange | 22808 |
| 0160-12845 | M-370CG-RS/N25 | Cold Cathode Gauge (RS485) | With NW25 Flange | 22809 |
| 0160-12853 | M-370CG-RS/N40 | Cold Cathode Gauge (RS485) | With NW40 Flange | 228010 |
| 0160-12861 | M-370CG-RS/C70 | Cold Cathode Gauge (RS485) | With φ70ICF Flange | 22811 |
| 0162-24379 | - | M-361CP/370CG Maintenance kit | Pole piece, Mesh | 22790 |