Ultra-High Vacuum Type-L All-metal Valve
This is an all-metal ultra-high vacuum type-L valve that can be used up to 10-8Pa or lower. It can be baked up to 400℃ or 450℃, making it suitable as a valve for ultra-high vacuum equipment that undergo hard bakes.
Components
Features
- For ultra-high vacuum range
All-metal valve that can be used in ultra-high vacuum range of up to 10-8Pa or lower. - Capturing seal structure
For the valve seal, a Capturing seal structure, which is highly reliable similar to flange, is adopted. - High heat tolerance
Can be baked up to 400℃ or 450℃. - Easy to change the gaskets
Specifications
Ultra-High Vacuum Type-L All-metal Valve(Type:951-7148)
| Type | 951-7148 |
|---|---|
| Operating vacuum range | Atmospheric to 10-8Pa or less |
| Leak | 6.7×10-11Pa·m3/sec or less |
| Fully open conductance | 4L/sec |
| Allowable heating temperature | 400℃ |
| Initial sealing torque | Approx. 15.7N·m |
| Maximum sealing torque | 23.5N·m |
| Main component material | Body:SUS-304 Bellows:SUS-304 Valve sealing gasket:Copper alloy Bonnet gasket:SUS-321 Silver Plated Metal Hallow O ring |
| Connection flange | φ34ICF flange |
| Weight | 0.7kg |
| Applicable torque wrench (Option) |
460F (Angular drive dimension□9.53mm) (JIS B4650 Plate Type Nominal 450 Equivalent) |
| Attachments | Gasket remover:1S Handle:×1 Nominal 2.5 hexagonal wrench:×1 Nominal 4 hexagonal wrench:×1 Wire brush:×1 Spare washer:Large, small ×1 each Total 2 Spare gasket:×1 |
Ultra-High Vacuum Type-L All-metal Valve(Type:951-7150 / 951-7152)
| Type | 951-7150 | 951-7152 |
|---|---|---|
| Operating vacuum range | Atmospheric to 10-8Pa or less | |
| Leak | 6.7×10-11Pa·m3/sec or less | |
| Fully open conductance | 30L/sec | 100L/sec |
| *Allowable heating temperature |
450℃ | |
| Initial sealing torque | 29.4 to 34.3N·m | 78.4 to 127.4N·m |
| Maximum sealing torque | 127.4N·m | 225.4N·m |
| Main component material | Body:SUS-304 Bellows:SUS-304 Valve sealing gasket :Copper alloy |
|
| Connection flange | φ70ICF flange | φ114IC flange |
| Weight | 1.6kg | 7kg |
| Applicable torque wrench | 1300F (Angular drive dimension□12.7mm) (JIS B4650 Plate Type Nominal 1300 Equivalent) |
2800F (Angular drive dimension□19.05mm) (JIS B4650 Plate Type Nominal 2800 Equivalent) |
| Attachments | Handle:×1 Nominal 2.5 hexagonal wrench:×1 Nominal 6 hexagonal wrench:×1 Wire brush:×1 Spare washer:Large, small ×1 each Total 2 Spare gasket:×1 |
Handle:×1 Nominal 10 hexagonal wrench:×1 BS ball point driver:×1 Wire brush:×1 Spare washer:Large, small ×1 each Total 2 Spare gasket:×1 |