Ultra-high Vacuum Type-L Polyimide Valve
This is a type-L valve that can be used in ultra-high vacuum range of up to 10-8Pa. The vacuum seal is made of polyimide resin, which is highly heat tolerant and low on gas emission. Suitable as a valve for ultra high-vacuum equipment with bake-out temperature of 150℃ or greater.
Components
Features
- High heat tolerance
Either open or closed, the polyimide seal endures repeated baking from room temperature to maximum 300℃. - Seal material with low gas emission
Since the gas emission of polyimide resin is lower than fluoro rubber (Viton), it can easily achieve ultra-high vacuum of about 10-8Pa. (See Dimension Diagram) - Small tightening torque
Polyimide seals do not require tightening torque as much as metal seals. Ultra-High Vacuum Type-L All-metal Valve
Specifications
Ultra-high Vacuum Type-L Polyimide Valve(Type:951-7145 / 951-7120)
| Type | 951-7145 | 951-7120 |
|---|---|---|
| Operating vacuum range | Atmospheric to 10-8Pa | |
| Allowable heating temperature*1, 2 |
300℃ | 300℃ |
| Seal material (gasket) |
Polymide resin | Polymide resin*4 |
| Recommended sealing force (sample tightening torque*5) |
1225 to 1921N (2 to 3.4N·m) | 3920 to 4900N (4.9 to 5.9N·m) |
| Maximum sealing force (sample tightening torque*5) |
2626N (5.9N·m) | 7840N (14.7N·m) |
| Operation | Manual | If baked several times, use adjustable pin face wrench |
| Conductance | 1L/sec | 30L/sec |
| Leak*3 | 6.7×10-11Pa·m3/sec or less | 6.7×10-11Pa·m3/sec or less |
| Used material | Main unit:SUS-304 Bellows:SUS-304L Handle:AL alloy (black alumite) |
Main unit:SUS-304 Bellows:SUS-304L Handle:AL alloy (black alumite) |
| Connection flange | φ34ICF flange | φ70ICF flange |
| Weight | 0.41kg | 1.6kg |
| Attachments | - | Adjustable pin face wrench, hexagonal wrench |
*1. All values are based on a valve with its interior replaced with vacuum or inert gas such as Ar gas.
*2. 260℃ if heated continuously.
*3. Gas permeation of the polyimide resin is out of specification.
*4. Please consult with us about upgrading the bonnet seal to a metal seal (SUS321 silver plated O-Ring).
*5. Tightening torque is a reference value, for baking increases the friction coefficient of the moving screw and changes the balance between the tightening torque and the tightening seal force.