Ultra-High Vacuum Variable Leak Valve
This variable leak valve is to be used for vacuum equipment that needs to control the amount of gas introduction. It enables the gas introduction of remarkably small amounts; minimum controllable leakage is less than 6.7×10-9Pam3/sec.
Additionally, it is all-metal and can be baked up to 450℃, making it ideal for ultra-high vacuum equipment.
Components
Features
- Seal with high resistance to heat and external shock
Sealed with WC-type cemented carbide combined with copper alloy. Unlike sealing with sapphire and copper alloy combination, there is no cracking from heat or mechanical effects. - Stable control of minute gas flow
It enables the gas introduction of remarkably small amounts; minimum controllable leakage is less than 6.7×10-9Pam3/sec (He gas introduced, primary-side gauge pressure at 0.2MPa). - High heat tolerance
All-metal and can be baked up to 450℃. - Wide gas flow control range.
- Connectable to ultra-high pressure
Applications
- Vacuum equipment that needs to control the amount of gas introduction.
- Sputtering equipment, gas analysis equipment.
- Physics experiment/research equipment.
Specifications
| Operating vacuum range | Atmospheric to 10-8Pa | |
|---|---|---|
| *1 Adjustable Minimum leak | 6.7×10-9Pa·m3/sec or less | |
| Leak when valve is closed | 6.7×10-11Pa·m3/sec or less | |
| *2 Allowable heating temperature | 450℃ (opened or closed) | |
| Gasket life | Approx. 300 seals (at room temperature) Approx. 30 seals (with baking) (Gasket replaceable) |
|
| Component material | Main body: SUS-304 Seal: WC type cemented carbide Gasket: Cu alloy |
|
| Connection flange |
Gas OUTLET side | φ70ICF fixed flange |
| Gas INLET side | φ8×φ6 SUS-304 tube (951-7170) φ34ICF with fixed flange (951-7172) |
|
| Attachments | 951-9160 gasket ×2 951-9160 ring ×2 951-9160 spanner ×1 Nominal bore 5 hexagonal wrench ×1 Nominal bore 8 hexagonal wrench ×1 |
|
| Weight | 1.3kg | |
*1. Values with 0.2MPa He gas connected to gas introduction side, and φ70ICF side pumped to vacuum.
*2. Values with the gas introduction side and φ70ICF side replaced with vacuum or inert gas such as Ar gas.