Ultra-High Vacuum Variable Leak Valve
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This variable leak valve is to be used for vacuum equipment that needs to control the amount of gas introduction. It enables the gas introduction of remarkably small amounts; minimum controllable leakage is less than 6.7×10-9Pam3/sec.
Additionally, it is all-metal and can be baked up to 450℃, making it ideal for ultra-high vacuum equipment.
Components
Features
- Seal with high resistance to heat and external shock
Sealed with WC-type cemented carbide combined with copper alloy. Unlike sealing with sapphire and copper alloy combination, there is no cracking from heat or mechanical effects. - Stable control of minute gas flow
It enables the gas introduction of remarkably small amounts; minimum controllable leakage is less than 6.7×10-9Pam3/sec (He gas introduced, primary-side gauge pressure at 0.2MPa). - High heat tolerance
All-metal and can be baked up to 450℃. - Wide gas flow control range.
- Connectable to ultra-high pressure
Applications
- Vacuum equipment that needs to control the amount of gas introduction.
- Sputtering equipment, gas analysis equipment.
- Physics experiment/research equipment.
Specifications
Operating vacuum range | Atmospheric to 10-8Pa | |
---|---|---|
*1 Adjustable Minimum leak | 6.7×10-9Pa·m3/sec or less | |
Leak when valve is closed | 6.7×10-11Pa·m3/sec or less | |
*2 Allowable heating temperature | 450℃ (opened or closed) | |
Gasket life | Approx. 300 seals (at room temperature) Approx. 30 seals (with baking) (Gasket replaceable) |
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Component material | Main body: SUS-304 Seal: WC type cemented carbide Gasket: Cu alloy |
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Connection flange |
Gas OUTLET side | φ70ICF fixed flange |
Gas INLET side | φ8×φ6 SUS-304 tube (951-7170) φ34ICF with fixed flange (951-7172) |
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Attachments | 951-9160 gasket ×2 951-9160 ring ×2 951-9160 spanner ×1 Nominal bore 5 hexagonal wrench ×1 Nominal bore 8 hexagonal wrench ×1 |
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Weight | 1.3kg |
*1. Values with 0.2MPa He gas connected to gas introduction side, and φ70ICF side pumped to vacuum.
*2. Values with the gas introduction side and φ70ICF side replaced with vacuum or inert gas such as Ar gas.