This is a leak valve to introduce specified gas into vacuum equipment. The shaft seal is made of austentic stainless-steel bellows, and the vacuum seal is made of fluoro rubber (Viton).
It is suitable as a gas introduction valve when leaking high vacuum or ultra-high vacuum equipment.
- For ultra-high vacuum range
Can be used in ultra-high vacuum range of up to about 10-7Pa.
- No atmospheric air mixing
The shaft seal uses bellows, preventing atmospheric air from being mixed in while introducing the gas.
- High heat tolerance
Can be baked up to 150℃.
|Operating vacuum range||Atmospheric to 10-7Pa|
|Leak when valve closed||6.7×10-11Pa·m3/sec or less*1|
|Allowable heating temperature*2||150℃ valve open, 125℃ valve closed|
|Main component material||Vacuum seal: Fluoro rubber (Viton)*3
Valve body: SUS304 Bellows: SUS304
L handle: Phenol resin
Connection flange φ70ICF, NW25 flange
|Connection flange||φ70ICF, NW25 flange|
*1. Gas permeation of the fluoro rubber (Viton) is out of specification.
*2. Please remove the handles before baking.
*3. The main seal and the bonnet seal.