Leak valve
This is a leak valve to introduce specified gas into vacuum equipment. The vacuum seal and the shaft seal are made of fluoro rubber (Viton).(951-7177･7178)
The vacuum seal uses an O-Ring made of fluoro rubber (Viton).(951-7190･7192)
It is suitable as an atmospheric air/specified gas introduction valve when leaking high vacuum or ultra-high vacuum equipment.
Components
Features
- For ultra-high vacuum range
Can be used in ultra-high vacuum range of up to about 10-7Pa. - High heat tolerance
Can be baked up to 125℃. - Can introduce specified gas (excluding O-Ring seal type)
Specifications
| Type | 951-7177, 951-7178 | 951-7190, 951-7192 |
|---|---|---|
| Operating vacuum range | Atmospheric to 10-7Pa | |
| Leak when valve closed | 6.7×10-11Pa·m3/sec or less*1 | |
| Orifice diameter | φ3.5mm | φ10mm |
| Allowable heating temperature*2 |
125℃*2 | |
| Main component material | Vacuum seal material: Fluoro rubber (Viton) Shaft seal material: Fluoro rubber (Viton) O ring Shaft seal lubricant: High vacuum silicon grease Valve body axis: SUS304 Valve element: Brass (Ni plating) Handle: Phenol resin |
Vacuum seal material: Fluoro rubber (Viton) O ring Valve body: SUS304 Valve element: SS34 (Ni plating) |
| Connection flange | φ70ICF, NW25 flange | |
| Weight | 0.4kg | 0.5kg |
*1. Gas permeation of the fluoro rubber (Viton) is out of specification.
*2. Please remove the handles before baking.