This is a leak valve to introduce specified gas into vacuum equipment. The vacuum seal and the shaft seal are made of fluoro rubber (Viton).(951-7177･7178)
The vacuum seal uses an O-Ring made of fluoro rubber (Viton).(951-7190･7192)
It is suitable as an atmospheric air/specified gas introduction valve when leaking high vacuum or ultra-high vacuum equipment.
- For ultra-high vacuum range
Can be used in ultra-high vacuum range of up to about 10-7Pa.
- High heat tolerance
Can be baked up to 125℃.
- Can introduce specified gas (excluding O-Ring seal type)
|Type||951-7177, 951-7178||951-7190, 951-7192|
|Operating vacuum range||Atmospheric to 10-7Pa|
|Leak when valve closed||6.7×10-11Pa·m3/sec or less*1|
|Main component material||Vacuum seal material: Fluoro rubber (Viton)
Shaft seal material: Fluoro rubber (Viton) O ring
Shaft seal lubricant: High vacuum silicon grease
Valve body axis: SUS304
Valve element: Brass (Ni plating)
Handle: Phenol resin
|Vacuum seal material: Fluoro rubber
(Viton) O ring
Valve body: SUS304
Valve element: SS34 (Ni plating)
|Connection flange||φ70ICF, NW25 flange|
*1. Gas permeation of the fluoro rubber (Viton) is out of specification.
*2. Please remove the handles before baking.