Sputtering Equipment EL3000
EL3000 is in-line sputtering equipment designed for small substrate production, such as LEDs. It supports the multi-layer deposition.
Information
- ITO transparent layer and metal electrode layer for LED production
- Supports batch processing of multiple substrates using a tray-based transfer system
- Substrate size : Φ2-inch, Φ3-inch, Φ4-inch, Φ6-inch, Φ8-inch, Tray-based substrate