LED production (ITO transparent conductive film, metal electrode film, etc.)
- Batch processing of multiple substrates by tray transport is possible due to rotary deposition which provides good deposition distribution over a large area.
φ2"substrate ×50/batch
φ3"substrate ×25/batch
φ4"substrate ×17/batch
φ6"substrate ×8/batch
- Fully automated operations (pumping, substrate transfer, deposition process)
- Standard equipped with up to four φ7.1" cathodes or φ12.5" cathodes
- Provides high target utilization with rotary magnetron cathode
- Equipment configuration is customizable according to application and production volume through sputtering chamber and stocker mechanism expansion
- System configuration:Load lock type tray transport method
- Substrate size:φ2" substrate to φ8" substrate
- Cathode:Up to φ7.1" cathode ×4 or φ12.5" cathode ×4
- Operation method:Fully automated (pumping, transport, deposition)
