PVD Equipment for Electronic Component Production EC7400

EC7400 is PVD equipment for electronic device production with a high-quality space-saving design which is the result of our experiences in semiconductor and disk manufacturing equipment.
It is a fully automated cluster type equipment that can accommodate a variety of process modules.


Electronic component production

  • Standard equipped with cassette chamber and transfer chamber (C to C specification)
  • Delivers excellent deposition distribution
  • Able to accommodate a variety of process modules according to usage
  • Provides high target utilization with rotary magnetron cathode
  • System configuration:Cluster type (up to three process chambers)
    C to C type
  • Substrate size:φ200mm maximum
  • Cathode:φ7.1" cathode (Up to 4. Varies depending on the module.)
  • Modules:Offset rotary sputtering module (multi-cathode specification)
    Offset rotary and revolutionary sputtering module
    Etching module (preprocessing)
    Preheating module (preprocessing)