Sputtering Equipment EC7400
EC7400 is sputtering equipment with a high-quality, space-saving design which is the result of our experiences in semiconductor and disk manufacturing equipment.
Information
- RF Filter
- Piezoelectric Devices
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Offering a range of sputtering modules tailored to various application needs
- Multi-cathode sputtering module designed for multi-layer deposition processes
- Semi-batch sputtering module offering high productivity and superior thickness uniformity
- Parallel-plate sputtering module designed for high deposition rates
- Substrate size : Φ4-inch, Φ6-inch, Φ8-inch, Tray-based substrate
- Number of installed modules : up to 3 modules
- Configurable modules : etching, heating