LED PVD Equipment EC8100
EC8100 is tray cluster PVD equipment for small substrate production, such as LED etc.
This clustered equipment enables forming of multi stacked structures.
Information
ITO transparent layer and metal electrode layer for LED production
- EC8100 is tray batch PVD equipment with stage rotation function, which realizes good thickness uniformity in wide areas. EC8100 realizes high productivity even for small size substrate process.
- φ2"substrate × 50 / batch
- φ3"substrate × 25 / batch
- φ4"substrate × 16 / batch
- φ6"substrate × 8 / batch
- φ8"substrate × 4 / batch
- Damage-less deposition (Long distance sputtering 240 to 340mm)
- Good thickness uniformity
- Good Target utilization
- Small footprint of 30% reduction (comparison of our products)
- System configuration:Tray cluster PVD equipment
- Substrate size:φ2" substrate to φ8" substrate