Sputtering Equipment EC8100
EC8100 is sputtering equipment designed for small substrate production, such as LEDs. It supports the multi-layer deposition.
This clustered equipment enables forming of multi stacked structures.
Information
- ITO transparent layer and metal electrode layer for LED production
- Supports batch processing of multiple substrates using a tray-based transfer system
- Low plasma damage
- Superior thickness uniformity
- Substrate size : Φ2-inch, Φ3-inch, Φ4-inch, Φ6-inch, Φ8-inch, Tray-based substrate