Etching Equipment NC8000
NC8000 is an etching equipment equipped with an ion-beam etching module, enabling one-step etching of magnetic multi-layer films, including MTJ structures, which are difficult to process using RIE.
In-situ processing from etching to cap layer deposition is available when equipped with a deposition module.
Information
- Etching of MRAM, magnetic sensors and hard-to-etch materials
- Adjustable incident energy and angle
- One-step etching of magnetic multi-layer films, which is difficult using RIE
- Superior etching uniformity and productivity with a large-diameter grid
- In-situ processing is available from etching to cap layer deposition
- Substrate size : Φ8-inch, Φ12-inch
- Number of installed modules : up to 5 modules
- Configurable modules : oxidation, passivation layer deposition(CVD, sputtering)