Disk PVD Equipment ML3000 Series
Sputtering equipment that supports mass production and next generation development of magnetic disks which are a key component of hard disk drives.
Information
Mass production and next generation development of hard disks (magnetic disks)
- Provides approximately twice the productivity (up to 1800 disks/hour) compared to competitive equipment
- Over ten days continuous operation.
- Excellent expandability enabling expansion of chambers according to customer process
- Emphasis on vacuum quality to improve magnetic characteristics (an order of magnitude performance improvement over our previous product).
- Provides high temperature heating and cooling unit for the development of next generation thermally assisted magnetic recording media
- 30% space reduction compared to our previous product
- System configuration:Inline type
- Substrate size:2.5-inch, 3.5-inch
- Productivity:Up to 1800 disks/hour (depending on equipment configuration and process time)
- Vacuum performance:Ultimate pressure around 10-6Pa
- Pumping system:Selectable between TMP and cryo pump
- Footprint:90m2 (P22 configuration)