Sputtering Equipment ML3000
ML3000 is an in-line sputtering system for HDD media, featuring high-speed transfer, high deposition rates, and scalable configurations to meet various production volumes.
It supports both mass production and next-generation magnetic disk development.
Information
- Mass production and next generation development of hard disks (magnetic disks)
- High productivity and excellent expandability
- Provides high temperature heating and cooling unit for the development of HAMR
HAMR：Heat-Assisted Magnetic Recording
- Substrate size : Φ2.5-inch, Φ3.5-inch
- Configurable modules : heating, cooling