Disk PVD Equipment ML3000 Series

Sputtering equipment that supports mass production and next generation development of magnetic disks which are a key component of hard disk drives.


Mass production and next generation development of hard disks (magnetic disks)

  • Provides approximately twice the productivity (up to 1800 disks/hour) compared to competitive equipment
  • Over ten days continuous operation.
  • Excellent expandability enabling expansion of chambers according to customer process
  • Emphasis on vacuum quality to improve magnetic characteristics (an order of magnitude performance improvement over our previous product).
  • Provides high temperature heating and cooling unit for the development of next generation thermally assisted magnetic recording media
  • 30% space reduction compared to our previous product
  • System configuration:Inline type
  • Substrate size:2.5-inch, 3.5-inch
  • Productivity:Up to 1800 disks/hour (depending on equipment configuration and process time)
  • Vacuum performance:Ultimate pressure around 10-6Pa
  • Pumping system:Selectable between TMP and cryo pump
  • Footprint:90m2 (P22 configuration)