Sputtering Equipment HC7300
HC7300 is sputtering equipment integrating sputtering and etching modules, and offers mass production capabilities for magnetic head.
Information
- Etching and passivation layer deposition for magnetic heads
- In-situ processing is available from etching to passivation layer deposition
- High productivity
- Substrate size : Φ6-inch, Φ8-inch
- Number of installed modules : up to 6 modules
- Configurable modules : etching, oxidation, heating, cooling