Milling→Insulator→HARD Bias→Cap Layer Integrated Manufacturing Equipment HC7300

Effectively consolidates magnetic head production processes.
This is integrated magnetic HEAD production equipment only possible with Canon ANELVA product lineup.


Magnetic head production

  • Delivers integrated processing from PR-on-TMR state to cap layer formation through milling and various types of deposition.
  • Provides optimum module lineup to enable optimum processing shape required by each element.
    (e.g. IBE, anisotropic sputtering, isotropic sputtering, RIE)
  • Delivers excellent deposition characteristic and high productivity through integrated vacuum process.
  • System configuration:Cluster type
  • Substrate size:φ150mm, φ200mm