POWER/POWERECO Series Cryo Pump
The POWER/POWERECO series cryopump system can be used in a wide range of applications from R & D equipment to mass production equipment by combining various units.
The POWER series (standard system) has a simple and easy-to-use configuration using a temperature monitor, and when combined with the CRYONAVI controller, automatic playback is possible.
The POWERECO series (Ecosystem) contributes to the achievement of SDGs by reducing power consumption and extending the maintenance period through a unique control system.
Components
Features
- POWER Series
- The self-heating function of the refrigerator enables safe, high-speed regeneration without a heater.
- During cooling (up to 20 K), the high-speed cooling operation allows the chiller to run at high speed and cool in a short time.
- Low vibration (our company ratio) with an average value of vibration acceleration of approximately 1/10 or less compared to conventional products.
- POWERECO Series
- The standard system allows multiple operation of 5 units for 8 inches and 4 units for 12 inches. Effective for energy and resource conservation with 15~70% reduction in power and cooling water consumption.
- Playback and startup time is less than half (compared to our company).
- Substantially improved argon exhaust capacity to 1.5~4 times that of our company.
Applications
- Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment)
- Electronic component manufacturing equipment
- Vacuum evaporation systems
- Vacuum furnaces, space chambers
- Accelerators
- Various high vacuum equipment
Specifications
POWER Series Cryopump Performance Specifications
| Pump Type | P-080C | P-081C | P-081CL | P-082C | P-083C | P-100C | P-100CL | P-101C | P-101CL | P-120C | P-120CL | P-121C | P-121CL | P-122C | Remarks | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Diameter | 8 inch | 8 inch | 8 inch | 8 inch | 8 inch | 10 inch | 10 inch | 10 inch | 10 inch | 12 inch | 12 inch | 12 inch | 12 inch | 12 inch | ||
| Shape | Vertical | Vertical | Horizontal | Vertical | Vertical | Vertical | Horizontal | Vertical | Horizontal | Vertical | Horizontal | Vertical | Horizontal | Vertical | ||
| Pumping speed (L/s) |
Nitrogen | 1,500 | 1,500 | 1,500 | 1,500 | 1,500 | 2,400 | 2,400 | 2,400 | 2,400 | 4,000 | 4,000 | 4,000 | 4,000 | 4,000 | |
| Argon | 1,300 | 1,300 | 1,300 | 1,300 | 1,300 | 2,000 | 2,000 | 2,000 | 2,000 | 3,200 | 3,200 | 3,200 | 3,200 | 3,200 | ||
| Hydrogen | 1,000 | 2,500 | 2,200 | 1,000 | 1,000 | 3,000 | 3,000 | 3,800 | 3,700 | 3,600 | 3,000 | 6,000 | 5,000 | 3,000 | ||
| Water | 4,500 | 4,500 | 4,500 | 4,500 | 4,500 | 7,100 | 7,100 | 7,100 | 7,100 | 9,000 | 9,000 | 9,000 | 9,000 | 9,000 | ||
| Maximum pumping flow (Pa·m3/s) |
1.5 | 1.2 | 1.2 | 1.5 | 1.5 | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | 1.0 | ||
| Maximum gas instantaneous tolerance (Pa·m3) |
18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | ||
| Startup time (min) | 45 | 50 | 65 | 45 | 50 | 70 | 80 | 70 | 80 | 60 | 90 | 70 | 100 | 60 | *1 | |
| Regeneration (heat-up) time (min) |
30 | 30 | 30 | 30 | 35 | 35 | 40 | 35 | 45 | 35 | 40 | 40 | 50 | 30 | *1 | |
| Startup regeneration time (min) |
75+α | 80+α | 95+α | 75+α | 85+α | 105+α | 120+α | 105+α | 125+α | 95+α | 130+α | 110+α | 150+α | 90+α | *1 | |
| Pumping capacity (Pa·m3) |
Argon | 80,000 | 80,000 | 80,000 | 150,000 | 190,000 | 160,000 | 140,000 | 160,000 | 140,000 | 260,000 | 200,000 | 260,000 | 200,000 | 400,000 | *2 |
| Hydrogen | 1,300 | 1,800 | 1,600 | 1,300 | 1,300 | 1,600 | 1,300 | 2,000 | 1,800 | 1,600 | 1,400 | 2,400 | 2,200 | 1,600 | ||
| Ultimate temperature(K) |
15 or less | |||||||||||||||
| Ultimate pressure(Pa) |
Approx. 10-7 | |||||||||||||||
| Maximum heating temperature(℃) |
70 | |||||||||||||||
| Ambient temperature range(℃) |
10 to 35 | |||||||||||||||
| Recommended maintenance interval(h) |
Within 16,000h | |||||||||||||||
| Weight (kg) | 20 | 21 | 22 | 23 | 24 | 25 | 25 | 24 | 25 | 29 | 30 | 29 | 30 | 30 | ||
| Number of operable units |
F-50L | 3 | 3 | 3 | 3 | 3 | 3 | 3 | 3 | 3 | *3 | 3 | 3 | 3 | 3 | |
Performance Specifications for Compact POWER Series Cryo Pumps
| Pump Type | P-085C | P-086C | P-086CL | P-087C | P-105C | P-105CL | P-106C | P-106CL | P-107C | Remarks | ||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Diameter | 8 inch | 8 inch | 8 inch | 8 inch | 10 inch | 10 inch | 10 inch | 10 inch | 10 inch | |||
| Shape | Vertical | Vertical | Horizontal | Vertical | Vertical | Horizontal | Vertical | Horizontal | Vertical | |||
| Pumping speed (L/s) |
Nitrogen | 1,500 | 1,500 | 1,500 | 1,500 | 2,400 | 2,400 | 2,400 | 2,400 | 2,200 | ||
| Argon | 1,300 | 1,300 | 1,300 | 1,300 | 2,000 | 2,000 | 2,000 | 2,000 | 1,600 | |||
| Hydrogen | 1,000 | 2,500 | 2,200 | 1,000 | 3,000 | 3,000 | 3,800 | 3,700 | 2,600 | |||
| Water | 4,500 | 4,500 | 4,500 | 4,500 | 7,100 | 7,100 | 7,100 | 7,100 | 7,100 | |||
| Maximum pumping flow (Pa·m3/s) |
1.2 | 1.2 | 1.1 | 1.2 | 1 | 1 | 1 | 1 | ||||
| Maximum gas instantaneous tolerance (Pa·m3) |
18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | 18.0 | |||
| Startuptime (min) | 60 | 65 | 80 | 60 | 75 | 90 | 85 | 100 | 120 | *1 | ||
| Regeneration (heat-up) time (min) |
40 | 40 | 45 | 40 | 45 | 50 | 45 | 50 | 50 | *1 | ||
| Startup regeneration time (min) |
100+α | 105+α | 125+α | 100+α | 120+α | 140+α | 130+α | 150+α | 170+α | *1 | ||
| Pumping capacity (Pa·m3) |
Argon | 80,000 | 80,000 | 80,000 | 150,000 | 160,000 | 140,000 | 160,000 | 140,000 | *2 | ||
| Hydrogen | 1,300 | 1,800 | 1,600 | 1,300 | 1,600 | 1,300 | 2,000 | 1,800 | 1,600 | |||
| Ultimate temperature(K) |
15 or less | |||||||||||
| Ultimate pressure(Pa) | Approx. 10-7 | |||||||||||
| Maximum heating temperature(℃) | 70 | |||||||||||
| Ambient temperature range(℃) | 10 to 35 | |||||||||||
| Recommended maintenance interval(h) | Within 16,000h | |||||||||||
| Weight (kg) | 22 | 22 | 22 | 23 | 25 | 27 | 24 | 25 | 29 | |||
| Number of operable units |
F-50L | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | *3,*4 | |
| CSW-61CN2 | 6 | 6 | 6 | 6 | *3 | 4 | 4 | 4 | 4 | 4 | ||
Performance Specifications for Medium and Large POWER Series Cryo Pumps
| Pump Type | P-128C | P-128CL | P-160C | P-161C | P-161CL | P-166C | P-201C | P-206C | P-226C | Remarks | |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Diameter | 12 inch | 12 inch | 16 inch | 16 inch | 16 inch | 16 inch | 20 inch | 20 inch | 22 inch | ||
| Shape | Vertical | Horizontal | Vertical | Vertical | Horizontal | Vertical | Vertical | Vertical | Vertical | ||
| Pumping speed (L/s) |
Nitrogen | 4,000 | 4,000 | 8,000 | 8,000 | 7,400 | 8,000 | 13,000 | 13,000 | 17,000 | |
| Argon | 3,200 | 3,200 | 5,500 | 5,500 | 5,000 | 5,500 | 9,000 | 9,000 | 11,000 | ||
| Hydrogen | 6,000 | 5,000 | 5,500 | 11,000 | 10,000 | 11,000 | 17,000 | 17,000 | 23,000 | ||
| Water | 9,000 | 9,000 | 17,000 | 17,000 | 17,000 | 17,000 | 28,000 | 28,000 | 39,000 | ||
| Maximum pumping flow (Pa·m3/s) |
2.2 | 2.2 | 2.2 | 2.0 | 2.2 | 3.5 | 1.3 | 3.0 | 2.7 | ||
| Maximum gas instantaneous tolerance (Pa·m3) |
40 | 40 | 50 | 50 | 50 | 50 | 80 | 80 | 133 | ||
| Startup time (min) | 110 | 115 | 70 | 90 | 120 | 80 | 150 | 100 | 120 | *1 | |
| Regeneration (heat-up) time (min) |
70 | 70 | 40 | 60 | 60 | 60 | 70 | 80 | 80 | *1 | |
| Startup regeneration time(min) |
180+α | 185+α | 110+α | 150+α | 180+α | 140+α | 220+α | 180+α | 200+α | *1 | |
| Pumping capacity (Pa·m3) |
Argon | 270,000 | 200,000 | 400,000 | 400,000 | 200,000 | 400,000 | 800,000 | 800,000 | 1,000,000 | *2 |
| Hydrogen | 4,000 | 3,500 | 1,600 | 3,400 | 3,000 | 3,400 | 4,500 | 7,500 | 7,500 | ||
| Ultimate temperature(K) |
15 or less | ||||||||||
| Ultimate pressure(Pa) |
Approx. 10-7 | ||||||||||
| Maximum heating temperature(℃) |
70 | ||||||||||
| Ambient temperature range(℃) |
10 to 35 | ||||||||||
| Recommended maintenance interval(h) |
Within 16,000h | ||||||||||
| Weight(kg) | 33 | 34 | 50 | 50 | 65 | 50 | 60 | 60 | 87 | ||
| Number of operable units |
F-50L | 2 | 2 | 2 | 2 | 2 | 2 | 2 | 2 | 1 | *3 |
| CSW-61CN2 | 2 | 2 | 2 | 2 | 2 | 1 | 2 | 1 | 1 | ||