Pump
Ion Pump･Sublimation Pump controller
- 20L/s Ion Pump, Noble Pump
- 30L/s Ion Pump, Noble Pump
- 60L/s Ion Pump, Noble Pump
- 110L/s Noble Pump, 140L/s Ion Pump
- 220L/s Noble Pump, 270L/s Ion Pump
- 220L/s Noble Pump, 270L/s Ion Pump
- 400L/s Noble Pump, 500L/s Ion Pump
- 800L/s Noble Pump, 1000L/s Ion Pump
- 800L/s Noble Pump, 1000L/s Ion Pump
- 400L/s Combination Pump
- 800L/s Combination Pump
- 1600L/s Combination Pump
- 125L/s Excel Pump
- Titanium Sublimation Pump
- Tie-Vac Pump
- 400L/s Gatter Chamber
- 800L/s Gatter Chamber
- 1600L/s Gatter Chamber
Cryo Pump
- P-101CL POWER Cryo Pump
- P-121C POWER Cryo Pump
- P-120CL,121CL POWER Cryo Pump
- P-080C POWER Cryo Pump
- P-081C POWER Cryo Pump
- P-081CL POWER Cryo Pump
- P-082C POWER Cryo Pump
- P-122C POWER Cryo Pump
- P-085C POWER Cryo Pump
- P-086C POWER Cryo Pump
- P-086CL POWER Cryo Pump
- P-087C POWER Cryo Pump
- P-106C POWER Cryo Pump
- P-106CL POWER Cryo Pump
- P-126C POWER Cryo Pump
- P-126CL POWER Cryo Pump
- P-127C POWER Cryo Pump
- P-128C POWER Cryo Pump
- P-128CL POWER Cryo Pump
- P-161C POWER Cryo Pump
- P-166C POWER Cryo Pump
- P-201C POWER Cryo Pump
- P-206C POWER Cryo Pump
- Eco Unit
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