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- Nippon Electric Varian founded (Head office: Azabu Minato-ku, Tokyo).
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- Head Office moved to Fuchu-shi, Tokyo.
Fuchu-shi, Tokyo
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- Joint Agreement with Varian terminated
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- Company name changed to NEC ANELVA CORPORATION.
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- Fuji Factory established.
- ANELVA ENGINEERING CORPORATION (AEC) founded.
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- ANELVA SHIZUOKA CORPORATION (SAN) established.
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- Third factory established on the premises of Fuji Factory.
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- Division Management Responsibility Equipment started.
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- ISO9001 certification obtained.
- Merged with AEC, with the company name changed to ANELVA CORPORATION.
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- Division Management Responsibility Equipment revised.
- FPD, MMD, Development Laboratory, and Advanced Product Development Div. established.
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- COSMOS series put on the market.
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- Thirtieth anniversary celebrated.
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- ISO14001 certification obtained.
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- ANELVA TECHNO BUSINESS CORPORATION established.
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- ANELVA TECHNIX CORPORATION established.
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- Company name changed to Canon ANELVA Corporation
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- Shinagawa Office opened in Tokyo.
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- Kurigi Head Office built at Kawasaki-shi Kanagawa.
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- The location of our head office changed.
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- Merger with Canon ANELVA Engineering Corporation and Canon ANELVA Technix Corporation.
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