Crystal Ion Gauge M-336MX
This is a combination gauge using a crystal gauge with excellent repeatability and response for measurement in the low vacuum range and a miniature B-A gauge proven over many years for measurement in the high vacuum range. A single device capable of measuring wide pressure range from atmospheric pressure to ultra-high vacuum.
Components
Features
- Combination gauge combining crystal gauge with miniature B-A gauge
- From ultra-high vacuum to atmospheric pressure
- High precision with excellent repeatability in the low vacuum range
Applications
- Roughing pump and ultimate pressure measurement of vacuum equipment, semiconductor and electronic component manufacturing equipment pressure measurement
Specifications
| Type | Crystal Ion Gauge | |
|---|---|---|
| M-336MX-SP Type with Set Point |
M-336MX-RS RS485 Type |
|
| Pressure measurement range* | 4×10-8 to 1×105(Pa) | |
| Input voltage | +20 to 28VDC | |
| Power consumption | 12W | |
| Analog output | 0 to 10V | - |
| Set point | - | |
| Interface | - | RS485 |
| I/O connector | D‐sub 9 pin | |
| Maximum cable length | 300m (1mm2)*1 | |
| Protection standard | IP40 compatible | |
| Operating temperature range*2 | 5 to 50℃ | |
| Storage temperature range*2 | -20 to 70℃ (not operating) | |
| Sensor Type | MX-1 | |
| Sensor material (main component) | Filament: Y2O3/Ir, Case: SUS304 | |
| Dimensions (mm) | 149×70×50 (NW25) | |
| Flange shape | NW16, NW25, NW40, φ70ICF | |
| Conformity | CE marking, RoHS, IP40 | |
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 0160-06797 | M-336MX-SP/N16 | Crystal Ion Gauge | w NW16 Flange | 22545 |
| 0160-06810 | M-336MX-SP/N25 | Crystal Ion Gauge | w NW25 Flange | 22546 |
| 0160-07206 | M-336MX-SP/N40 | Crystal Ion Gauge | w NW40 Flange | 22547 |
| 0160-06828 | M-336MX-SP/C70 | Crystal Ion Gauge | w φ70ICF Flange | 22548 |
| 0160-06836 | M-336MX-SP/N16 | Crystal Ion Gauge (RS485) | w NW16 Flange | 22549 |
| 0160-06844 | M-336MX-SP/N25 | Crystal Ion Gauge (RS485) | w NW25 Flange | 22550 |
| 0160-07963 | M-336MX-SP/N40 | Crystal Ion Gauge (RS485) | w NW40 Flange | 22551 |
| 0160-06852 | M-336MX-SP/C70 | Crystal Ion Gauge (RS485) | w φ70ICF Flange | 22552 |
| 0161-14825 | MX-1/N16 | Crystal Ion Gauge Head (336MX) | w NW16 Flange | 22559 |
| 0161-14752 | MX-1/N25 | Crystal Ion Gauge Head (336MX) | w NW25 Flange | 22560 |
| 0161-14689 | MX-1/N40 | Crystal Ion Gauge Head (336MX) | w NW40 Flange | 22561 |
| 0161-14647 | MX-1/C70 | Crystal Ion Gauge Head (336MX) | w φ70ICF Flange | 22562 |