Wide Range Ionization Vacuum Gauge M-431HG
M-431HG is a space-saving light weight vacuum control power supply made exclusively for miniature gauges.
Components
Features
- Standard equipped with external I/O and RS-232C communication functions
- Input voltage is wide voltage
- Conformity with CE marking and RoHS
Applications
- Automated vacuum equipment pressure measurement
- Sputtering process pressure measurement and control
- Multi-chamber system pressure measurement
- General vacuum equipment pressure measurement
Specifications
| Type | ||
|---|---|---|
| Pressure display range | 0.01×10-7 to 13.2×100 Pa ※1 | |
| Pressure display | Digital, measurement range auto switch | |
| Set point | Standard equipped with 2 points (with hysteresis) | |
| D/A output | Switch between Log or combined output (0 to 10V) | |
| Analog output | 0 to 10V (APC compatible output) | |
| External control function (Remote control) |
INPUT | Filament ON/OFF, Parameter LOCK, Filament switching, Degas ON/OFF, Range Hold |
| OUTPUT | Set point 1, 2, Filament ON/OFF status Degas status, Filament 1/2 status |
|
| Communication function | RS232C standard equipped (9600, 4800, 2400, 1200bps) | |
| Dimensions (mm), Weight | 104W×99H×296D 1.2Kg | |
| Power consumption | 50VA 90 to 240VAC 50/60Hz ※2 | |
| Emission current | 10μA, 100μA, 1mA (auto switched, or fixed) | |
| Degas | Grid electrical heating method, 3 min timer | |
| Filament switching | Key and remote I/O control | |
| Filament protection | Filament OFF at 13.3×100 Pa | |
| Standard configuration | Vacuum gauge main unit (measurement ball and cables not included) | |
| Conformity | CE marking, RoHS | |
※1 About the measurement range, please refer to a section of miniature gauge MG-2.
※2 The cable included with the M-431HG is for use at 100V. Please contact us when using at 200V.
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 0161-55554 | M-431HG | Wide Range Ion Gauge | Controller for Miniature Gauge only, w/o Cable / Gauge Head | 21685 |
| H21-03430 | 430-901 | Cable for Miniature B-A Gauge (5M) | for MG-2/2F, Standard Cable | 21672 |
| H21-03432 | 430-902 | Cable for Miniature B-A Gauge (10M) | for MG-2/2F | 21673 |
| H21-03433 | 430-903 | Cable for Miniature B-A Gauge (15M) | for MG-2/2F | 21674 |
| 0161-24189 | 430-904 | Cable for Miniature B-A Gauge (20M) | for MG-2/2F | 21675 |
| 0161-44820 | 430-911 | Bakable Cable for MG-2 (5M) | Maximum Usable Temperature Range 250ﾟC | 21676 |
| 0161-44838 | 430-912 | Bakable Cable for MG-2 (10M) | Maximum Usable Temperature Range 250ﾟC | 21677 |
| 0161-36966 | 430-913 | Bakable Cable for MG-2 (15M) | Maximum Usable Temperature Range 250ﾟC | 21678 |
| 0161-36974 | 430-914 | Bakable Cable for MG-2 (20M) | Maximum Usable Temperature Range 250ﾟC | 21679 |