Ionization Vacuum Gauge M-723HG, M-823HG, M-923HG
This is a series of most common B-A ionization vacuum gauges with abundant expansion board selection supporting a variety of gauges.
Standard equipped with remote control function and range hold function necessary for process control of vacuum equipment. A type capable of controlling communication with CC-Link is also available.
The M-823HG enables accurate measurement from atmospheric pressure to high vacuum range with a single device.
Components
Features
- Automatically switched pressure range.
- Pressures and messages are displayed on LCD.
- Variety of external control functions enabling fully remote operation.
- Standard equipped with two set points.
Applications
- Automated vacuum equipment pressure measurement
- Sputtering process pressure measurement and control
- Multi-chamber system pressure measurement
Specifications
| Type | M-723HG | M-823HG | M-923HG |
|---|---|---|---|
| Measurement ball | UGD-1S B-A Gauge Ball | BRG-1B Wide Range B-A Gauge Ball | NIG-2F/NIG-2TF Nude Ion Gauge Ball |
| Pressure measurement range (Pa) |
5 range auto switch 10-2, 10-3, 10-4, 10-5, 10-6 |
7 range auto switch 10-0, 10-1, 10-2, 10-3, 10-4, 10-5, 10-6 |
8 range auto switch 10-2, 10-3, 10-4, 10-5, 10-6, 10-7, 10-8, 10-9 |
| Measurement range switching |
Auto switching (range hold possible) | ||
| Degas | Grid electrical heating method | Electron bombardment method | |
| Filament switching | Can be switched from the front panel or by external control input (excluding M823HG) | ||
| Filament protection | Turns off automatically if there is a problem in the fluctuation range of pressure, ion current, or emission current. | ||
| Analog output | D/A output (mantissa D/A output, exponent D/A output, combined D/A output) analogy raw output (electrometer output) |
||
| I/O remote | INPUT | Filament ON/OFF input, degas ON/OFF input, filament inhibit input, range hold 1 input, range hold 2 input, filament switch input, gauge 1/2 switch input (when using gauge select option) |
|
| OUTPUT | Filament ON/OFF output, degas ON/OFF output, remote/local output, set point output (2 points), gauge 1/2 select output (when using gauge selector option), power ON/OFF output, filament 1/2 output, alarm output |
||
| Set point | Standard equipped with 2 set points (open collector) | ||
| Dimensions (mm) | H99×W209×D330 | ||
| Power requirements | 100VAC±10%2A, 50/60Hz (also supports 115/200/230VAC) | ||
| Weight | 5.4kg (When no option boards are installed) | ||
| Standard configuration | Vacuum gauge main unit (measurement ball and cable are not included) | ||
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 0161-80355 | M-723HG | Ion Gauge | JIS Rack Type, for UGD-1S Gauge Head | 21704 |
| 0161-80486 | M-813HG | Wide Range Ion Gauge | JIS Rack Type, for BRG-1B Gauge Head | 21728 |
| 0161-71445 | M-923HG | UHV Vacuum Gauge | JIS Rack Type, for NIG-2F Gauge Head | 21734 |
| P13-06804 | 921-303 | Gauge Selector Box (for M-922HG) | Cable for M-922HG (w Cable to Unit 5M･to Gauge 2M) | 21745 |
| P13-08435 | 721-303 | Gauge Selector Box (for M-722HG/M-822HG) | Cable for M-722HG/M-822HG (w Cable to Unit 5M･to Gauge 2M) | 21764 |
| H21-01490 | 921-801 | Rack Mount Panel | for M-722HG/M-822HG/M-922HG | 21765 |
| 0161-68604 | 722-TC | TC Gauge Board | 21487 | |
| 0161-70465 | 722-BCD | BCD Output Board | for M-722HG/M-822HG/M-922HG w Connecter | 21483 |
| 0161-70423 | 722-CM | CM.XTL Gauge Board | for M-722HG/M-822HG/M-922HG w Connecter | 21483 |
| P23-04131 | 722-SPB | Set Points Board | for M-722HG/M-822HG/M-922HG w Connecter | 21480 |
| H21-02971 | 722-232C | RS-232C Board | for M-722HG/M-822HG/M-922HG w Connecter | 21487 |
| H21-02966 | 722-GPIB | RS-232C Board | for M-722HG/M-822HG/M-922HG w/o Cable | 21484 |
| 9-3428 | 820-901 | Cable for B-A Gauge (5M) | for M-722HG/M-822HG, 5M | 21645 |
| 9-3319 | 820-902 | Cable for B-A Gauge (10M) | for M-722HG/M-822HG, 10M | 21646 |
| P13-14966 | 820-903 | Cable for B-A Gauge (15M) | for M-722HG/M-822HG, 15M | 21647 |
| P13-14967 | 820-904 | Cable for B-A Gauge (20M) | for M-722HG/M-822HG, 20M | 21648 |
| 9-3429 | 921-901 | Cable for Nude Ion Gauge (5M) | for M-922HG, 5M | 21750 |
| P13-14128 | 921-902 | Cable for Nude Ion Gauge （10M) | for M-922HG, 10M | 21751 |
| P13-14129 | 921-903 | Cable for Nude Ion Gauge (15M) | for M-922HG, 15M | 21752 |
| P13-14130 | 921-904 | Cable for Nude Ion Gauge (20M) | for M-922HG, 20M | 21753 |
| 0161-36411 | 921-911 | Bakable Cable for Nude Ion Gauge (5M) | for M-922HG, Bakable 5M | 21754 |
| P13-22893 | 921-912 | Extension Cable for Nude Ion Gauge (5M) | 921-911 for Extension, 5M (total 10m) | 21755 |
| 0161-36932 | 921-913 | Extension Cable for Nude Ion Gauge (10M) | 921-911 for Extension, 10M (total 15m) | 21756 |
| 0161-36940 | 921-914 | Extension Cable for Nude Ion Gauge (15M) | 921-911 for Extension, 15M (total 20m) | 21757 |