Ionization Vacuum Gauge M-723HG, M-823HG, M-923HG
This is a series of most common B-A ionization vacuum gauges with abundant expansion board selection supporting a variety of gauges.
Standard equipped with remote control function and range hold function necessary for process control of vacuum equipment. A type capable of controlling communication with CC-Link is also available.
The M-823HG enables accurate measurement from atmospheric pressure to high vacuum range with a single device.
Components
Features
- Automatically switched pressure range.
- Pressures and messages are displayed on LCD.
- Variety of external control functions enabling fully remote operation.
- Standard equipped with two set points.
Applications
- Automated vacuum equipment pressure measurement
- Sputtering process pressure measurement and control
- Multi-chamber system pressure measurement
Specifications
| Type | M-723HG | M-823HG | M-923HG |
|---|---|---|---|
| Measurement ball | UGD-1S B-A Gauge Ball | BRG-1B Wide Range B-A Gauge Ball | NIG-2F/NIG-2TF Nude Ion Gauge Ball |
| Pressure measurement range (Pa) |
5 range auto switch 10-2, 10-3, 10-4, 10-5, 10-6 |
7 range auto switch 10-0, 10-1, 10-2, 10-3, 10-4, 10-5, 10-6 |
8 range auto switch 10-2, 10-3, 10-4, 10-5, 10-6, 10-7, 10-8, 10-9 |
| Measurement range switching |
Auto switching (range hold possible) | ||
| Degas | Grid electrical heating method | Electron bombardment method | |
| Filament switching | Can be switched from the front panel or by external control input (excluding M823HG) | ||
| Filament protection | Turns off automatically if there is a problem in the fluctuation range of pressure, ion current, or emission current. | ||
| Analog output | D/A output (mantissa D/A output, exponent D/A output, combined D/A output) analogy raw output (electrometer output) |
||
| I/O remote | INPUT | Filament ON/OFF input, degas ON/OFF input, filament inhibit input, range hold 1 input, range hold 2 input, filament switch input, gauge 1/2 switch input (when using gauge select option) |
|
| OUTPUT | Filament ON/OFF output, degas ON/OFF output, remote/local output, set point output (2 points), gauge 1/2 select output (when using gauge selector option), power ON/OFF output, filament 1/2 output, alarm output |
||
| Set point | Standard equipped with 2 set points (open collector) | ||
| Dimensions (mm) | H99×W209×D330 | ||
| Power requirements | 100VAC±10%2A, 50/60Hz (also supports 115/200/230VAC) | ||
| Weight | 5.4kg (When no option boards are installed) | ||
| Standard configuration | Vacuum gauge main unit (measurement ball and cable are not included) | ||
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 8B1-0015-935 | M-723HG | Ion Gauge | JIS Rack Type, for UGD-1S Gauge Head | 21704 |
| 8B1-0015-944 | M-813HG | Wide Range Ion Gauge | JIS Rack Type, for BRG-1B Gauge Head | 21728 |
| 8B1-0015-427 | M-923HG | UHV Vacuum Gauge | JIS Rack Type, for NIG-2F Gauge Head | 21734 |
| 8B1-0017-634 | 921-303 | Gauge Selector Box (for M-922HG) | Cable for M-922HG (w Cable to Unit 5M･to Gauge 2M) | 21745 |
|
8G1-0413-470 |
921-801 |
Rack Mount Panel | for M-722HG/M-822HG/M-922HG | 21765 |
| 8B1-0036-818 |
722-TC (R) |
TC Gauge Board |
21491 |
|
| 8B1-0015-378 |
722-BCD (R) |
BCD Output Board | for M-722HG/M-822HG/M-922HG w Connecter |
21492 |
| 8B1-0015-377 |
722-SPB (R) |
Set Points Board | for M-722HG/M-822HG/M-922HG w Connecter |
21480 |
| 8B1-0015-377 |
722-232C (R) |
RS-232C Board | for M-722HG/M-822HG/M-922HG w Connecter |
21495 |
| 8B1-0016-447 | 820-901 | Cable for B-A Gauge (5M) | for M-722HG/M-822HG, 5M | 21645 |
| 8B1-0016-487 | 820-902 | Cable for B-A Gauge (10M) | for M-722HG/M-822HG, 10M | 21646 |
| 8B1-0016-491 | 820-903 | Cable for B-A Gauge (15M) | for M-722HG/M-822HG, 15M | 21647 |
| 8B1-0016-496 | 820-904 | Cable for B-A Gauge (20M) | for M-722HG/M-822HG, 20M | 21648 |
| 8B1-0016-165 | 921-901 | Cable for Nude Ion Gauge (5M) | for M-922HG, 5M | 21750 |
| 8B1-0013-530 | 921-902 | Cable for Nude Ion Gauge （10M) | for M-922HG, 10M | 21751 |
| 8B1-0016-170 | 921-903 | Cable for Nude Ion Gauge (15M) | for M-922HG, 15M | 21752 |
| 8B1-0016-171 | 921-904 | Cable for Nude Ion Gauge (20M) | for M-922HG, 20M | 21753 |
| 8B1-0013-529 | 921-911 | Bakable Cable for Nude Ion Gauge (5M) | for M-922HG, Bakable 5M | 21754 |
| 8B1-0016-596 | 921-912 | Extension Cable for Nude Ion Gauge (5M) | 921-911 for Extension, 5M (total 10m) | 21755 |
| 8B1-0013-559 | 921-913 | Extension Cable for Nude Ion Gauge (10M) | 921-911 for Extension, 10M (total 15m) | 21756 |
| 8B1-0013-560 | 921-914 | Extension Cable for Nude Ion Gauge (15M) | 921-911 for Extension, 15M (total 20m) | 21757 |