Miniature Gauge MG-2/MG-2M/MG-2F MG-2/WF
A miniature gauge is a small gauge ball made of metal.
It enables pressure measurement from ultimate pressure to process pressure of sputters (measurement around 1Pa) with a single gauge.
Connects to gauge adapter (O-ring insertion type). (φ15mm, φ18mm)
NW16/25, φ34ICF, and φ70ICF type are available.
Components
Specifications
| Type | MG-2 | MG-2M | MG-2I/ NW16,25 |
MG-2I/ φ34ICF,φ70ICF |
MG-2F | MG-2/WF | |
|---|---|---|---|---|---|---|---|
| Body material | SUS304 | ||||||
| Maximum pressure measurement(Note 1) |
13Pa | 1.3×10-1(Note 3)Pa | |||||
| Minimum pressure measurement(Note 2) |
Approx. 10-6Pa | Approx. 10-7Pa | Approx. 1.0×10-5(Note 4)Pa | ||||
| Sensitivity | 0.045Pa-1 | ||||||
| Filament | Two filaments built-in Filament material: Yttria coated iridium wire |
Two filaments built-in Filament material: Tungsten |
|||||
| Measurement ball capacity | Approx. 12cc | ||||||
| Power power |
Filament Grid degas |
2.3W 1.0W |
2.5W 1.0W |
||||
| Degassing method | Grid electrical heating | ||||||
| Attachment method | Can be welded to φ15 gauge adapter or various flanges | φ18 gauge adapter | NW25, NW16 | φ34ICF, φ70ICF |
Connect to φ70ICF flange | Can be welded to φ15 gauge adapter or various flanges | |
Dimensions
Various flange installation example
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 0160-01234 | MG-2 | Miniature B-A Gauge Head | Connecter φ15 Type | 21160 |
| 0160-01284 | MG-2M | Miniature B-A Gauge Head | Connecter φ18 Type | 21162 |
| H21-03193 | MG-2I/NW16 | Miniature B-A Gauge Head with NW16 | 21163 | |
| H21-03194 | MG-2I/NW25 | Miniature B-A Gauge Head with NW25 | 21164 | |
| H21-03195 | MG-2I/ICF34 | Miniature B-A Gauge Head with ICF34 | 21165 | |
| P25-04306 | MG-2I/ICF70 | Miniature B-A Gauge Head with ICF70 | 21166 | |
| 0160-01268 | MG-2F | Miniature B-A Gauge Head | Connecter φ70ICF Type | 21161 |
| 0160-02222 | MG-2F/WF | Miniature B-A Gauge (Tungsten Type) | 21167 | |
| 89-4367 | MG-2WF | Miniature B-A Gauge Head | Tungsten Filament Type, Connecter φ15 Type | 21170 |
| 0161-02640 | MG-2WF/N25 | Miniature B-A Gauge Head W filament with NW25 | Tungsten Filament Type, Connecter φ15 Type | 21176 |